노광 장치 및 디바이스 제조 방법

    公开(公告)号:KR20180041649A

    公开(公告)日:2018-04-24

    申请号:KR20180043866

    申请日:2018-04-16

    Applicant: CANON KK

    Inventor: MATSUMOTO HIDEKI

    CPC classification number: G03F7/70725 G03F7/70341

    Abstract: 본발명에따른액침-타입노광장치는기판을측정하기위한측정영역, 측정영역과상이하고투영광학시스템을거쳐기판을노광하기위한노광영역, 기판을보유하고노광영역과측정영역사이에서이동가능하도록구성된복수의스테이지그리고복수의스테이지의구동을제어하도록구성된제어기를포함하고, 복수의스테이지중 하나의스테이지가노광영역내에위치되고하나의스테이지상으로공급되는액침액이노광영역내에보유되어있다가다른하나의스테이지로전달되는경우에, 제어기는적어도다른하나의스테이지의제1 처리위치를기초로하여다른하나의스테이지에대한액침액의전달위치를결정하도록구성된다.

    4.
    发明专利
    未知

    公开(公告)号:DE69929667D1

    公开(公告)日:2006-04-13

    申请号:DE69929667

    申请日:1999-12-22

    Applicant: CANON KK

    Abstract: A developing device for developing an electrostatic latent image formed on an electrophotographic photosensitive member, said developing device being mountable to a main assembly of an electrophotographic image forming apparatus, said developing device includes a developer carrying member for feeding a developer to said electrophotographic photosensitive member to develop the electrostatic latent image formed on the electrophotographic photosensitive member; a first electroconductive portion; a second electroconductive portion for cooperating with said first electroconductive portion to provide an electrostatic capacity; a first electrical contact for receiving a voltage to be applied to said first electroconductive portion from the main assembly of the electrophotographic image forming apparatus; a second electrical contact for transmitting, to the main assembly of the electrophotographic image forming apparatus, an electric signal corresponding to an electrostatic capacity between said first electroconductive portion and said second electroconductive portion when a voltage is applied to said first electroconductive portion to detect a remaining amount of the developer by the main assembly of the electrophotographic image forming apparatus.

    5.
    发明专利
    未知

    公开(公告)号:DE69927103D1

    公开(公告)日:2005-10-13

    申请号:DE69927103

    申请日:1999-10-07

    Applicant: CANON KK

    Abstract: An electrophotographic image forming apparatus for forming an image on a recording material includes a first electrostatic capacity generating portion disposed at such a position that first electrostatic capacity generating portion is contacted to the developer accommodated in said developer accommodating portion when a predetermined amount of the developer is accommodated in said developer accommodating portion, said first electrostatic capacity generating portion generating an electrostatic capacity corresponding to an amount the developer when said first electrostatic capacity generating portion is supplied with a voltage, and a second electrostatic capacity generating portion disposed at such a position that second electrostatic capacity generating portion is not contacted to the developer accommodated in said developer accommodating portion, said second electrostatic capacity generating portion generating a reference electrostatic capacity when said second electrostatic capacity generating portion is supplied with a voltage; developer amount detecting means for detecting an amount of the developer accommodated in said developer accommodating portion on the basis of the electrostatic capacity generated by said first electrostatic capacity generating portion and the reference electrostatic capacity generated by said second electrostatic capacity generating portion; electrostatic latent image forming means for forming an electrostatic latent image on said electrophotographic photosensitive member.

    6.
    发明专利
    未知

    公开(公告)号:DE69926108D1

    公开(公告)日:2005-08-18

    申请号:DE69926108

    申请日:1999-10-07

    Applicant: CANON KK

    Abstract: A process cartridge detachably mountable to an electrophotographic image forming apparatus, said process cartridge includes (a) an electrophotographic photosensitive member; (b) process means actable on the electrophotographic photosensitive member; (c) a measuring electrode member having input side and output side electrodes having at least one juxtaposed portions, the measuring electrode member being disposed at such a position that it is contacted to a developer; (d) a reference electrode member having input side and output side electrodes having at least one juxtaposed portions, the reference electrode member being disposed at such a position that it is out of contact to the developer; (e) an output contact for the measuring electrode member, connected electrically to the output side electrode of the measuring electrode member; (f) an output contact for the reference electrode member, connected electrically to the output side electrode of the reference electrode member; and (g) a common input contact connected electrically to the input side electrodes of the measuring electrode member and the reference electrode member.

    Electrophotographic image forming apparatus, process cartridge, developing device and measuring part

    公开(公告)号:AU744971B2

    公开(公告)日:2002-03-07

    申请号:AU5350999

    申请日:1999-10-07

    Applicant: CANON KK

    Abstract: A process cartridge detachably mountable to an electrophotographic image forming apparatus, said process cartridge includes (a) an electrophotographic photosensitive member; (b) process means actable on the electrophotographic photosensitive member; (c) a measuring electrode member having input side and output side electrodes having at least one juxtaposed portions, the measuring electrode member being disposed at such a position that it is contacted to a developer; (d) a reference electrode member having input side and output side electrodes having at least one juxtaposed portions, the reference electrode member being disposed at such a position that it is out of contact to the developer; (e) an output contact for the measuring electrode member, connected electrically to the output side electrode of the measuring electrode member; (f) an output contact for the reference electrode member, connected electrically to the output side electrode of the reference electrode member; and (g) a common input contact connected electrically to the input side electrodes of the measuring electrode member and the reference electrode member.

    Electrophotographic image forming apparatus, process cartridge, developing device, developer supply container and measuring part therefor

    公开(公告)号:AU5351099A

    公开(公告)日:2000-04-13

    申请号:AU5351099

    申请日:1999-10-07

    Applicant: CANON KK

    Abstract: An electrophotographic image forming apparatus for forming an image on a recording material includes a first electrostatic capacity generating portion disposed at such a position that first electrostatic capacity generating portion is contacted to the developer accommodated in said developer accommodating portion when a predetermined amount of the developer is accommodated in said developer accommodating portion, said first electrostatic capacity generating portion generating an electrostatic capacity corresponding to an amount the developer when said first electrostatic capacity generating portion is supplied with a voltage, and a second electrostatic capacity generating portion disposed at such a position that second electrostatic capacity generating portion is not contacted to the developer accommodated in said developer accommodating portion, said second electrostatic capacity generating portion generating a reference electrostatic capacity when said second electrostatic capacity generating portion is supplied with a voltage; developer amount detecting means for detecting an amount of the developer accommodated in said developer accommodating portion on the basis of the electrostatic capacity generated by said first electrostatic capacity generating portion and the reference electrostatic capacity generated by said second electrostatic capacity generating portion; electrostatic latent image forming means for forming an electrostatic latent image on said electrophotographic photosensitive member.

    Electrophotographic image forming apparatus, process cartridge, developing device and measuring part

    公开(公告)号:AU5350999A

    公开(公告)日:2000-04-13

    申请号:AU5350999

    申请日:1999-10-07

    Applicant: CANON KK

    Abstract: A process cartridge detachably mountable to an electrophotographic image forming apparatus, said process cartridge includes (a) an electrophotographic photosensitive member; (b) process means actable on the electrophotographic photosensitive member; (c) a measuring electrode member having input side and output side electrodes having at least one juxtaposed portions, the measuring electrode member being disposed at such a position that it is contacted to a developer; (d) a reference electrode member having input side and output side electrodes having at least one juxtaposed portions, the reference electrode member being disposed at such a position that it is out of contact to the developer; (e) an output contact for the measuring electrode member, connected electrically to the output side electrode of the measuring electrode member; (f) an output contact for the reference electrode member, connected electrically to the output side electrode of the reference electrode member; and (g) a common input contact connected electrically to the input side electrodes of the measuring electrode member and the reference electrode member.

    ELECTROPHOTOGRAPHIC IMAGE FORMING APPARATUS, PROCESS CARTRIDGE, DEVELOPING DEVICE AND MEASURING PART

    公开(公告)号:CA2285157A1

    公开(公告)日:2000-04-09

    申请号:CA2285157

    申请日:1999-10-06

    Applicant: CANON KK

    Abstract: A process cartridge detachably mountable to an electrophotographic image forming apparatus, said process cartridge includes (a) an electrophotographic photosensitive member; (b) process means actable on the electrophotographic photosensitive member; (c) a measuring electrode member having input side and output side electrodes having at least one juxtaposed portions, the measuring electrode member being disposed at such a position that it is contacted to a developer; (d) a reference electrode member having input side and output side electrodes having at least one juxtaposed portions, the reference electrode member being disposed at such a position that it is out of contact to the developer; (e) an output contact for the measuring electrode member, connected electrically to the output side electrode of the measuring electrode member; (f) an output contact for the reference electrode member, connected electrically to the output side electrode of the reference electrode member; and (g) a common input contact connected electrically to the input side electrodes of the measuring electrode member and the reference electrode member.

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