公开(公告)号：KR20200125475A

公开(公告)日：2020-11-04

申请号：KR20200047822

申请日：2020-04-21

Applicant: CANON KK

Inventor： NAMBA HISASHI ,  HASEGAWA NORIYASU ,  KATSUTA KEN ,  KAWAHARA NOBUTO ,  MATSUMOTO HIDEKI

IPC: B41J2/14 ,  B41J2/175 ,  B41J29/38 ,  G03F7/00 ,  G03F7/16

Abstract: 토출장치는패턴을형성하도록기판상에토출되는토출재에대해몰드를압박하는임프린트장치에사용된다. 토출장치는기판상에토출재를토출하도록구성되는토출헤드및 토출재를수용하도록구성되는하우징을구비한하우징유닛, 및토출장치의처리를제어하도록구성되는제어유닛을포함한다. 제어유닛은하우징유닛에포함된소모품의사용상황에따라처리를전환한다.

公开(公告)号：KR20200136833A

公开(公告)日：2020-12-08

申请号：KR20200062900

申请日：2020-05-26

Applicant: CANON KK

Inventor： KURI MASAHIRO ,  HASEGAWA NORIYASU ,  NAMBA HISASHI ,  KATSUTA KEN ,  SAKAI KEITA ,  KAWAHARA NOBUTO ,  KOBAYASHI KENICHI

IPC: B29C59/00 ,  B29C31/04 ,  B29C59/02 ,  B29L31/34 ,  B41J2/095 ,  G03F7/00 ,  G03F7/16

Abstract: 액체상태의토출재를토출하는토출구를갖는토출헤드; 토출재를내부에수용하고토출헤드와연통하는수용용기; 및수용용기내부의압력을부압으로유지하는압력제어유닛을포함하는토출장치가제공된다. 압력제어유닛은통상동작시에는상기수용용기에제1 압력을발생시키며, 상기제1 압력은토출구내에토출재의메니스커스를형성할수 있다. 상기압력제어유닛은상기수용용기내부의압력이제1 압력을초과한미리결정된압력에도달하는경우에는수용용기내부의압력을적어도제1 압력까지저하시킨다.

公开(公告)号：KR20200125460A

公开(公告)日：2020-11-04

申请号：KR20200046429

申请日：2020-04-17

Applicant: CANON KK

Inventor： KAWAHARA NOBUTO ,  ARAKI YOSHIMASA ,  MITA YUTAKA ,  HASEGAWA NORIYASU ,  IWASAKI YUICHI

IPC: B41J2/175 ,  G03F7/00 ,  G03F7/16

Abstract: 보관장치는, 토출재를수용하는수용용기, 및수용용기에수용되어있는토출재를토출하는토출구를포함하는토출헤드를포함하는토출카트리지를보관한다. 보관장치는, 토출카트리지가탑재되는탑재대를포함하고, 토출구가밀폐되어있지않은상태에서탑재대에고정되는토출카트리지의수용용기의내부의압력을제어하도록구성되는압력조절탱크를포함한다.

公开(公告)号：SG11201607890SA

公开(公告)日：2016-10-28

申请号：SG11201607890S

申请日：2015-04-07

Applicant: CANON KK

Inventor： CHOI BYUNG-JIN ,  CHERALA ANSHUMAN ,  YE ZHENGMAO ,  LU XIAOMING ,  LUO KANG ,  KAWAHARA NOBUTO ,  MIYAJIMA YOSHIKAZU

IPC: H01L21/027 ,  B29C59/02

Abstract: Provided is an imprint apparatus for contacting a resin applied to a substrate with a mold to perform patterning on the substrate. The imprint apparatus includes a substrate holding unit for holding the substrate, wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction, the plurality of holding areas has different width dimension in the direction respectively based on positions in the direction, a surface ratio between two holding areas of the plurality of holding areas with different width dimension respectively is within a range of 0.8 to 1.2.