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公开(公告)号：FR2590065A1
公开(公告)日：1987-05-15
申请号：FR8612783
申请日：1986-09-12
Inventor： YOSHIKAZU MIYAJIMA , MIYAJIMA YOSHIKAZU , MAKOTO SHIMO , SHIMO MAKOTO
IPC: G11B11/105 , G11B5/127 , G11B13/04
Abstract: L'INVENTION CONCERNE UN APPAREIL D'ENREGISTREMENT MAGNETO-OPTIQUE D'INFORMATIONS. IL COMPORTE UN OBJECTIF 5 DESTINE A CONDENSER UN FAISCEAU LUMINEUX SUR UN SUPPORT D'ENREGISTREMENT MAGNETO-OPTIQUE1, UN DISPOSITIF PRODUISANT UN CHAMP MAGNETIQUE DE POLARISATION ET COMPRENANT UNE CULASSE9, ET UN BATI EXTERIEUR PROTECTEUR8 CONTENANT L'OBJECTIF ET PRESENTANT UNE OUVERTURE7 POUR LE PASSAGE D'UN FAISCEAU LUMINEUX, DANS UNE POSITION OPPOSEE AU SUPPORT D'ENREGISTREMENT. AU MOINS UNE PARTIE DE CE BATI EXTERIEUR PROTECTEUR EST FORMEE D'UNE MATIERE FERROMAGNETIQUE. DOMAINE D'APPLICATION: ENREGISTREMENT MAGNETO-OPTIQUE D'INFORMATIONS.
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公开(公告)号：SG11201608330YA
公开(公告)日：2016-11-29
申请号：SG11201608330Y
申请日：2015-04-16
Applicant: CANON KK
Inventor： YAMAGUCHI HIROMITSU , TAMURA YASUYUKI , MIYAJIMA YOSHIKAZU , SAITO AKIO
IPC: H01L21/027 , B29C59/02
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公开(公告)号：DE69228576D1
公开(公告)日：1999-04-15
申请号：DE69228576
申请日：1992-07-24
Applicant: CANON KK
Inventor： KAKIMOTO HIROAKI , DATE NOBUAKI , MIYAJIMA YOSHIKAZU , CHAYA MASAHIKO
Abstract: A magnetooptical information recording/reproducing apparatus is provided with a floating slider for supporting a magnetic head for applying a magnetic field modulated according to information to a magnetooptical information recording medium. The floating slider is adapted to be retracted from the recording medium according to the kind of the medium by a retraction device, so that the floating slider is free from damages on the slider or in the medium loaded in the apparatus.
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公开(公告)号：GB2181879A
公开(公告)日：1987-04-29
申请号：GB8622064
申请日：1986-09-12
Applicant: CANON KK
Inventor： MIYAJIMA YOSHIKAZU , SHIHO MAKOTO
IPC: G11B5/127 , G11B11/105 , G11B11/10
Abstract: A magneto-optical information recording apparatus comprises an objective for condensing a light beam on a magneto-optical recording medium, a bias magnetic field producing device provided on the opposite side of the objective with respect to the magneto-optical recording medium and applying a magnetic field from outside to the magneto-optical recording medium near the condensed point of the light beam, and a protective outer frame containing the objective therein and having an opening for transmitting the light beam therethrough at a location opposed to the magneto-optical recording medium, at least a portion of the protective outer frame being formed of a ferromagnetic material.
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公开(公告)号：ES2128338T3
公开(公告)日：1999-05-16
申请号：ES92306815
申请日：1992-07-24
Applicant: CANON KK
Inventor： KAKIMOTO HIROAKI , DATE NOBUAKI , MIYAJIMA YOSHIKAZU , CHAYA MASAHIKO
Abstract: A magnetooptical information recording/reproducing apparatus is provided with a floating slider for supporting a magnetic head for applying a magnetic field modulated according to information to a magnetooptical information recording medium. The floating slider is adapted to be retracted from the recording medium according to the kind of the medium by a retraction device, so that the floating slider is free from damages on the slider or in the medium loaded in the apparatus.
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Patent Agency Ranking
公开(公告)号：DE3630691A1
公开(公告)日：1987-03-26
申请号：DE3630691
申请日：1986-09-09
Applicant: CANON KK
Inventor： MIYAJIMA YOSHIKAZU , SHIHO MAKOTO
IPC: G11B5/127 , G11B11/105 , G11B13/04
Abstract: A magneto-optical information recording apparatus comprises an objective for condensing a light beam on a magneto-optical recording medium, a bias magnetic field producing device provided on the opposite side of the objective with respect to the magneto-optical recording medium and applying a magnetic field from outside to the magneto-optical recording medium near the condensed point of the light beam, and a protective outer frame containing the objective therein and having an opening for transmitting the light beam therethrough at a location opposed to the magneto-optical recording medium, at least a portion of the protective outer frame being formed of a ferromagnetic material.
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7.发明公开REFLECTION MIRROR APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开反射镜装置，曝光装置及零部件生产工艺
公开(公告)号：EP1518262A4
公开(公告)日：2007-03-14
申请号：EP03761769
申请日：2003-06-19
Applicant: CANON KK
Inventor： MIYAJIMA YOSHIKAZU
IPC: G02B5/10 , G02B17/00 , G03F7/20 , G21K1/06 , H01L21/027
CPC classification number: G21K1/06 , G02B7/1815 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70891 , G21K2201/065 , G21K2201/067
Abstract: A reflection mirror apparatus, used in a reflection optical system of an exposure apparatus which performs exposure processing by guiding exposure light by reflection, has a mirror having a reflection surface to reflect the exposure light, and radiation plates for radiation-cooling provided in positions away from an outer surface of the mirror. The radiation plates are provided so as to ensure a passage area for the exposure light incident on and reflected from the reflection surface of the mirror. Further, the respective radiation plates are temperature-controlled by cooling liquid flowing through cooling pipes. Thus the temperature rise of the mirror used in the reflection optical system of the exposure apparatus can be suppressed, and the accuracy of surface form of the mirror reflection surface can be maintained.
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公开(公告)号：SG11201607890SA
公开(公告)日：2016-10-28
申请号：SG11201607890S
申请日：2015-04-07
Applicant: CANON KK
Inventor： CHOI BYUNG-JIN , CHERALA ANSHUMAN , YE ZHENGMAO , LU XIAOMING , LUO KANG , KAWAHARA NOBUTO , MIYAJIMA YOSHIKAZU
IPC: H01L21/027 , B29C59/02
Abstract: Provided is an imprint apparatus for contacting a resin applied to a substrate with a mold to perform patterning on the substrate. The imprint apparatus includes a substrate holding unit for holding the substrate, wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction, the plurality of holding areas has different width dimension in the direction respectively based on positions in the direction, a surface ratio between two holding areas of the plurality of holding areas with different width dimension respectively is within a range of 0.8 to 1.2.
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公开(公告)号：DE602004020427D1
公开(公告)日：2009-05-20
申请号：DE602004020427
申请日：2004-07-06
Applicant: CANON KK
Inventor： MIYAJIMA YOSHIKAZU
Abstract: According to this invention, there is provided an exposure apparatus capable of minimizing disturbance from the connecting portions of piping systems in a wafer stage (4), dust from pipes, and electrostatic buildup on the surfaces of piping members. The exposure apparatus according to this invention is an exposure apparatus (5) which projects a pattern drawn on the surface of a master onto a substrate through a projection optical system (illumination system unit) (1) and moves both of the master and substrate or only the substrate by the stage apparatus (4) relative to the projection optical system, thereby repeatedly exposing the substrate to the pattern of the master. In the apparatus, a plurality of pipes which are connected to a movable unit of the stage apparatus and have different inner and outer diameters are jointed to each other at partial outer surfaces of the pipes and are integrated into a pipe array (20) or (21).
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公开(公告)号：DE69228576T2
公开(公告)日：1999-08-26
申请号：DE69228576
申请日：1992-07-24
Applicant: CANON KK
Inventor： KAKIMOTO HIROAKI , DATE NOBUAKI , MIYAJIMA YOSHIKAZU , CHAYA MASAHIKO
Abstract: A magnetooptical information recording/reproducing apparatus is provided with a floating slider for supporting a magnetic head for applying a magnetic field modulated according to information to a magnetooptical information recording medium. The floating slider is adapted to be retracted from the recording medium according to the kind of the medium by a retraction device, so that the floating slider is free from damages on the slider or in the medium loaded in the apparatus.
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