公开(公告)号：DE10297648T5

公开(公告)日：2005-01-27

申请号：DE10297648

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MCCANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

Abstract: A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.