公开(公告)号：WO03065443A2

公开(公告)日：2003-08-07

申请号：PCT/US0238960

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC ,  NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

CPC classification number: G01R31/2886 ,  G01R1/18 ,  G01R31/2831 ,  G01R31/2887 ,  G01R31/311

Abstract: The probe station (10) includes the chuck (12) that supports the electrical device (14) to be probed by the probe apparatus (16) that extends through an opening in the platen (18), an outer shield box (24) provides sufficient space for the chuck (12) to be moved laterally by positioner (22), because the chuck (12) may freely move within the outer shield box (24), a suspended member (26) electrically interconnected to a guard potential may readily position above the chuck (12).

Abstract translation: 探针台（10）包括支撑电子装置（14）的卡盘（12），该探针装置（16）通过延伸穿过台板（18）中的开口的探测器装置（16）探测，外部屏蔽盒（24）提供 由于卡盘12可以在外屏蔽盒24内自由移动，所以卡盘12有足够的空间由定位器22横向移动，与保护电位电互连的悬挂构件26可以容易地 位于卡盘（12）上方的位置。

公开(公告)号：WO2006031646A3

公开(公告)日：2006-07-20

申请号：PCT/US2005032159

申请日：2005-09-08

Applicant: CASCADE MICROTECH INC ,  BURCHAM TERRY ,  MCCANN PETER ,  JONES ROD

Inventor： BURCHAM TERRY ,  MCCANN PETER ,  JONES ROD

IPC: G01R31/28

CPC classification number: G01R31/2806 ,  G01R1/0408 ,  G01R1/06705 ,  G01R31/2822 ,  G01R35/005

Abstract: A test configuration for dour e sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.

Abstract translation: 用于对被测器件进行双面探测的测试配置包括：固定器，其以第一方向固定被测器件;固定在第二方向上的校准基板;以及能够使用校准基板进行校准的探针;以及探测器件 测试。

公开(公告)号：DE10297648T5

公开(公告)日：2005-01-27

申请号：DE10297648

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MCCANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

Abstract: A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.