公开(公告)号：WO03065443A2

公开(公告)日：2003-08-07

申请号：PCT/US0238960

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC ,  NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

CPC classification number: G01R31/2886 ,  G01R1/18 ,  G01R31/2831 ,  G01R31/2887 ,  G01R31/311

Abstract: The probe station (10) includes the chuck (12) that supports the electrical device (14) to be probed by the probe apparatus (16) that extends through an opening in the platen (18), an outer shield box (24) provides sufficient space for the chuck (12) to be moved laterally by positioner (22), because the chuck (12) may freely move within the outer shield box (24), a suspended member (26) electrically interconnected to a guard potential may readily position above the chuck (12).

Abstract translation: 探针台（10）包括支撑电子装置（14）的卡盘（12），该探针装置（16）通过延伸穿过台板（18）中的开口的探测器装置（16）探测，外部屏蔽盒（24）提供 由于卡盘12可以在外屏蔽盒24内自由移动，所以卡盘12有足够的空间由定位器22横向移动，与保护电位电互连的悬挂构件26可以容易地 位于卡盘（12）上方的位置。

公开(公告)号：WO2004107400A2

公开(公告)日：2004-12-09

申请号：PCT/US2004012248

申请日：2004-04-22

Applicant: CASCADE MICROTECH INC ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  BURCHAM TERRY ,  MCMANN PETER ,  JONES RODD ,  DUNKLEE JOHN ,  LESHER TIM ,  NEWTON DAVID

Inventor： STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  BURCHAM TERRY ,  MCMANN PETER ,  JONES RODD ,  DUNKLEE JOHN ,  LESHER TIM ,  NEWTON DAVID

IPC: G01R31/28 ,  H01L

CPC classification number: G01R31/2887

Abstract: A chuck includes a conductive element that contacts a device under test in a location on the chuck.

Abstract translation: 卡盘包括在卡盘上的位置接触被测设备的导电元件。

公开(公告)号：DE10297648T5

公开(公告)日：2005-01-27

申请号：DE10297648

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MCCANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

Abstract: A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.