公开(公告)号：WO03065443A2

公开(公告)日：2003-08-07

申请号：PCT/US0238960

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC ,  NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MC CANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

CPC classification number: G01R31/2886 ,  G01R1/18 ,  G01R31/2831 ,  G01R31/2887 ,  G01R31/311

Abstract: The probe station (10) includes the chuck (12) that supports the electrical device (14) to be probed by the probe apparatus (16) that extends through an opening in the platen (18), an outer shield box (24) provides sufficient space for the chuck (12) to be moved laterally by positioner (22), because the chuck (12) may freely move within the outer shield box (24), a suspended member (26) electrically interconnected to a guard potential may readily position above the chuck (12).

Abstract translation: 探针台（10）包括支撑电子装置（14）的卡盘（12），该探针装置（16）通过延伸穿过台板（18）中的开口的探测器装置（16）探测，外部屏蔽盒（24）提供 由于卡盘12可以在外屏蔽盒24内自由移动，所以卡盘12有足够的空间由定位器22横向移动，与保护电位电互连的悬挂构件26可以容易地 位于卡盘（12）上方的位置。

公开(公告)号：WO2005121824A2

公开(公告)日：2005-12-22

申请号：PCT/US2005015977

申请日：2005-05-06

Applicant: CASCADE MICROTECH INC ,  RUMBAUGH SCOTT

Inventor： RUMBAUGH SCOTT

IPC: G01R1/04 ,  G01R31/26 ,  G01R31/28

CPC classification number: G01R1/0458 ,  G01R31/286 ,  G01R31/2891

Abstract: An accessible optical path to a lower surface of a heatable device under test is provided by a thermal optical chuck comprising a transparent resistor deposited on transparent plate arranged to supporting the device in a probe station.

Abstract translation: 通过包括沉积在透明板上的透明电阻器的热光学卡盘提供到被测加热装置的下表面的可访问的光路，该透明电阻器被布置成在探测台中支撑该装置。

公开(公告)号：DE10297648T5

公开(公告)日：2005-01-27

申请号：DE10297648

申请日：2002-12-04

Applicant: CASCADE MICROTECH INC

Inventor： NAVRATIL PETER ,  FROEMKE BRAD ,  STEWART CRAIG ,  LORD ANTHONY ,  SPENCER JEFF ,  RUMBAUGH SCOTT ,  FISHER GAVIN ,  MCCANN PETE ,  JONES ROD

IPC: G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

Abstract: A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.

公开(公告)号：DE10393724B4

公开(公告)日：2008-11-20

申请号：DE10393724

申请日：2003-10-28

Applicant: CASCADE MICROTECH INC

Inventor： HAYDEN LEONARD ,  RUMBAUGH SCOTT ,  ANDREWS MIKE

IPC: G01R1/067 ,  G01R31/28 ,  H01L21/66

Abstract: The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.

公开(公告)号：DE10393724T5

公开(公告)日：2005-10-13

申请号：DE10393724

申请日：2003-10-28

Applicant: CASCADE MICROTECH INC

Inventor： HAYDEN LEONARD ,  RUMBAUGH SCOTT ,  ANDREWS MIKE

IPC: G01R1/067 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

Abstract: The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.

公开(公告)号：AU2003288936A1

公开(公告)日：2004-06-03

申请号：AU2003288936

申请日：2003-10-28

Applicant: CASCADE MICROTECH INC

Inventor： HAYDEN LEONARD ,  RUMBAUGH SCOTT ,  ANDREWS MIKE

IPC: G01R1/067 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

Abstract: The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.