公开(公告)号：FR2859250A1

公开(公告)日：2005-03-04

申请号：FR0310282

申请日：2003-08-29

Applicant: CIT ALCATEL

Inventor： RIVAL JEAN LUC

IPC: F04D19/04 ,  F04D23/00 ,  F04D25/06

公开(公告)号：FR2860385B1

公开(公告)日：2007-06-01

申请号：FR0311280

申请日：2003-09-26

Applicant: CIT ALCATEL

Inventor： BARTHOD BENOIT ,  RIVAL JEAN LUC ,  MORPAIN MATTHIEU

IPC: G21K5/00 ,  H05G2/00 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H01L21/027 ,  H01S3/097 ,  H05G1/00

Abstract: The source has a radiation zone (3) situated in a radiation chamber (1) connected to turbomolecular pumps (11). A collector device (13) for collecting and conditioning extreme ultraviolet (EUV) radiation emitted by a radiation generating material, is placed in a transmission chamber (2) that is connected to turbomolecular pumps (12). The chamber (2) is connected to the chamber (1) through a diaphragm (4) having reduced dimension. The turbomolecular pumps (11) maintain a pressure that is higher than the pressure maintained by the turbomolecular pumps (12). The diaphragm is provided at proximity of the radiation zone (3) and is oriented along an optical axis. An independent claim is also included for a photolithography device comprising extreme ultraviolet radiation source.

公开(公告)号：FR2859250B1

公开(公告)日：2005-11-11

申请号：FR0310282

申请日：2003-08-29

Applicant: CIT ALCATEL

Inventor： RIVAL JEAN LUC

IPC: F04D19/04 ,  F04D23/00 ,  F04D25/06

公开(公告)号：FR2812040B1

公开(公告)日：2003-02-07

申请号：FR0009401

申请日：2000-07-18

Applicant: CIT ALCATEL

Inventor： RIVAL JEAN LUC ,  CACARD ALBERT ,  HOUZE FRANCOIS

IPC: F04D29/08 ,  F01C21/10 ,  F04C23/00 ,  F04C29/00 ,  F04C29/04 ,  F04D29/00 ,  F04D29/053 ,  F04C25/02 ,  F04C18/12

Abstract: The invention concerns a pumping unit wherein the vacuum pump (100) is driven by a motor (3, 4) comprised in a common monobloc housing forming motor housing (5) and oil pan (18) containing a gear assembly (17) for coupling two parallel pump rotors (14). To complement the sealing conditions provided by a dynamic seal (6), the motor stator (4) consists of an electric coil embedded in an oil-tight and gas-tight resin, thereby not requiring other more expensive and bulky sealing means, reducing production cost and enhancing the pumping unit dependability.

公开(公告)号：FR2883934B1

公开(公告)日：2010-08-20

申请号：FR0503352

申请日：2005-04-05

Applicant: CIT ALCATEL

Inventor： RIVAL JEAN LUC

IPC: F04C18/12 ,  F04C23/00 ,  F04C25/02

公开(公告)号：FR2860385A1

公开(公告)日：2005-04-01

申请号：FR0311280

申请日：2003-09-26

Applicant: CIT ALCATEL

Inventor： BARTHOD BENOIT ,  RIVAL JEAN LUC ,  MORPAIN MATTHIEU

IPC: G21K5/00 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H01L21/027 ,  H05G1/00 ,  H05G2/00 ,  H01S3/097

Abstract: The source has a radiation zone (3) situated in a radiation chamber (1) connected to turbomolecular pumps (11). A collector device (13) for collecting and conditioning extreme ultraviolet (EUV) radiation emitted by a radiation generating material, is placed in a transmission chamber (2) that is connected to turbomolecular pumps (12). The chamber (2) is connected to the chamber (1) through a diaphragm (4) having reduced dimension. The turbomolecular pumps (11) maintain a pressure that is higher than the pressure maintained by the turbomolecular pumps (12). The diaphragm is provided at proximity of the radiation zone (3) and is oriented along an optical axis. An independent claim is also included for a photolithography device comprising extreme ultraviolet radiation source.

公开(公告)号：FR2812041A1

公开(公告)日：2002-01-25

申请号：FR0009520

申请日：2000-07-20

Applicant: CIT ALCATEL

Inventor： RIVAL JEAN LUC

IPC: F01C21/10 ,  F04C18/08 ,  F04C18/12 ,  F04C28/28 ,  F04C29/04 ,  F04C25/02 ,  F04C29/00 ,  F04C18/14

Abstract: The pump includes a proximity sensor (16) disposed in the stator (1) and adapted to detect the play (E) at the neighborhood of a control zone (17) between the stator and the rotor (4). The control zone is in or at the neighborhood of the critical zone (117) where the contact is most probable between the rotor and the stator during one evolution of temperature of the rotor and/or the stator. The signal produced by the sensor is used for controlling the cooling circuit of the stator, in order to maintain the play at a value greater to the minimum admissible value.

公开(公告)号：FR2812040A1

公开(公告)日：2002-01-25

申请号：FR0009401

申请日：2000-07-18

Applicant: CIT ALCATEL

Inventor： RIVAL JEAN LUC ,  CACARD ALBERT ,  HOUZE FRANCOIS

IPC: F04D29/08 ,  F01C21/10 ,  F04C23/00 ,  F04C29/00 ,  F04C29/04 ,  F04D29/00 ,  F04D29/053 ,  F04C25/02 ,  F04C18/12

Abstract: The invention concerns a pumping unit wherein the vacuum pump (100) is driven by a motor (3, 4) comprised in a common monobloc housing forming motor housing (5) and oil pan (18) containing a gear assembly (17) for coupling two parallel pump rotors (14). To complement the sealing conditions provided by a dynamic seal (6), the motor stator (4) consists of an electric coil embedded in an oil-tight and gas-tight resin, thereby not requiring other more expensive and bulky sealing means, reducing production cost and enhancing the pumping unit dependability.