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公开(公告)号：KR20070073605A
公开(公告)日：2007-07-10
申请号：KR20070000033
申请日：2007-01-02
Applicant: CIT ALCATEL
Inventor： BERNARD ROLAND , BARTHOD BENOIT
CPC classification number: F04D19/042 , H01J35/103 , H01J35/106 , H01J35/14 , H01J35/20 , H01J35/26
Abstract: A compact source having an X-ray beam of very high brilliance is provided to lengthen a life time of a rotary anode within an X-ray source. A vacuum container(7) is defined by a sealing wall. A vacuum pump(1) includes a stator(1b) installed within an outer sealing casing(1f), a rotor(1a), and rotor controllers(10a-10e) and is connected to the vacuum container in order to form a vacuum state of the vacuum container. A cathode(3) is formed to generate lines of electric force within the vacuum container. A rotary anode(2) is rotated around a rotary shaft within the vacuum container. An edge(2a) of the rotary anode receives the lines of electric force from the cathode in order to radiate an X-ray to an outlet(11). The rotary anode is connected to the rotor and is disposed in the same axis as the axis of the rotor. The sealing casing is used for forming the sealing wall of the vacuum container. One or more cooling elements(8,9) are fixed to the stator or the outer sealing casing facing main radiative surfaces(2b,2c) of the rotary anode.
Abstract translation: 提供具有非常高亮度的X射线束的致密源，以延长X射线源内旋转阳极的使用寿命。 真空容器（7）由密封壁限定。 真空泵（1）包括安装在外部密封壳体（1f）内的定子（1b），转子（1a）和转子控制器（10a-10e），并且与真空容器连接以形成真空状态 的真空容器。 阴极（3）形成为在真空容器内产生电力线。 旋转阳极（2）围绕真空容器内的旋转轴旋转。 旋转阳极的边缘（2a）从阴极接收电力线，以便将X射线辐射到出口（11）。 旋转阳极连接到转子并且设置在与转子的轴线相同的轴线上。 密封壳体用于形成真空容器的密封壁。 一个或多个冷却元件（8,9）固定到面向旋转阳极的主辐射表面（2b，2c）的定子或外部密封壳体。
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公开(公告)号：DE69400540D1
公开(公告)日：1996-10-24
申请号：DE69400540
申请日：1994-03-30
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , CHICHERIE JEAN-PIERRE , PERRILLAT-AMEDE DENIS
Abstract: The machine comprises a cylindrical piston (1) of axis DELTA p, which is rotary and situated in a cylindrical capsule (5) of axis DELTA c, the piston (1) having a profile having Sp axes of symmetry, the said capsule (5) defining a hollow volume (4) of which the cross section through a plane perpendicular to its axis DELTA c, has Sc axes of symmetry, Sp and Sc being different from one another by one, the axes DELTA p and DELTA c, which are parallel, being separated by a distance E, the piston (1) and the capsule (5) delimiting between them at least three chambers (A, B, C) and the capsule including at least one suction inlet (9, 10, 11) and one delivery outlet (13, 14, 15) and the machine is characterised in that it comprises a ferromagnetic gear (2, 30) of axis DELTA p integral with the piston (1) and including Np teeth, located inside a ferromagnetic ring (6, 32) of axis DELTA c and integral with the capsule (5), the said ring being equipped with NB electric coils (20, 33) arranged radially, in that the ratio Np DIVIDED NB is equal to the ratio Sp DIVIDED Sc, and in that the NB electric coils (20, 33) of the said ring (6, 32) are powered in succession.
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公开(公告)号：FR2860385B1
公开(公告)日：2007-06-01
申请号：FR0311280
申请日：2003-09-26
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , RIVAL JEAN LUC , MORPAIN MATTHIEU
Abstract: The source has a radiation zone (3) situated in a radiation chamber (1) connected to turbomolecular pumps (11). A collector device (13) for collecting and conditioning extreme ultraviolet (EUV) radiation emitted by a radiation generating material, is placed in a transmission chamber (2) that is connected to turbomolecular pumps (12). The chamber (2) is connected to the chamber (1) through a diaphragm (4) having reduced dimension. The turbomolecular pumps (11) maintain a pressure that is higher than the pressure maintained by the turbomolecular pumps (12). The diaphragm is provided at proximity of the radiation zone (3) and is oriented along an optical axis. An independent claim is also included for a photolithography device comprising extreme ultraviolet radiation source.
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公开(公告)号：DE69403020T2
公开(公告)日：1997-08-14
申请号：DE69403020
申请日：1994-02-16
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , CHICHERIE JEAN-PIERRE , PERRILLAT-AMEDE DENIS
Abstract: A positive-displacement machine comprising a piston situated in a casing. The outline of the piston is hypertrochoidal, as is the outline of the hollow inside volume of the casing. The piston has n axes of symmetry, and the casing has n+1 axes of symmetry. The piston rotates inside the casing in orbital motion about the axis DELTA c of the casing. To obtain the rotation in orbital motion, firstly the piston is freely rotatably mounted on a crank pin that has its axis offset relative to the axis of a supporting shaft that is coaxial with the axis DELTA c of the casing, the shaft being rotated, and secondly the surface of the piston and the surface of the hollow inside volume of the casing are equipped with permanent magnets creating magnetic repulsion forces.
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Patent Agency Ranking
公开(公告)号：FR2701737B1
公开(公告)日：1995-04-14
申请号：FR9301926
申请日：1993-02-19
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , JEAN-PIERREPER DENIS CHICHERIE
Abstract: A positive-displacement machine comprising a piston situated in a casing. The outline of the piston is hypertrochoidal, as is the outline of the hollow inside volume of the casing. The piston has n axes of symmetry, and the casing has n+1 axes of symmetry. The piston rotates inside the casing in orbital motion about the axis DELTA c of the casing. To obtain the rotation in orbital motion, firstly the piston is freely rotatably mounted on a crank pin that has its axis offset relative to the axis of a supporting shaft that is coaxial with the axis DELTA c of the casing, the shaft being rotated, and secondly the surface of the piston and the surface of the hollow inside volume of the casing are equipped with permanent magnets creating magnetic repulsion forces.
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公开(公告)号：DE69403020D1
公开(公告)日：1997-06-12
申请号：DE69403020
申请日：1994-02-16
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , CHICHERIE JEAN-PIERRE , PERRILLAT-AMEDE DENIS
Abstract: A positive-displacement machine comprising a piston situated in a casing. The outline of the piston is hypertrochoidal, as is the outline of the hollow inside volume of the casing. The piston has n axes of symmetry, and the casing has n+1 axes of symmetry. The piston rotates inside the casing in orbital motion about the axis DELTA c of the casing. To obtain the rotation in orbital motion, firstly the piston is freely rotatably mounted on a crank pin that has its axis offset relative to the axis of a supporting shaft that is coaxial with the axis DELTA c of the casing, the shaft being rotated, and secondly the surface of the piston and the surface of the hollow inside volume of the casing are equipped with permanent magnets creating magnetic repulsion forces.
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公开(公告)号：DE69400540T2
公开(公告)日：1997-01-30
申请号：DE69400540
申请日：1994-03-30
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , CHICHERIE JEAN-PIERRE , PERRILLAT-AMEDE DENIS
Abstract: The machine comprises a cylindrical piston (1) of axis DELTA p, which is rotary and situated in a cylindrical capsule (5) of axis DELTA c, the piston (1) having a profile having Sp axes of symmetry, the said capsule (5) defining a hollow volume (4) of which the cross section through a plane perpendicular to its axis DELTA c, has Sc axes of symmetry, Sp and Sc being different from one another by one, the axes DELTA p and DELTA c, which are parallel, being separated by a distance E, the piston (1) and the capsule (5) delimiting between them at least three chambers (A, B, C) and the capsule including at least one suction inlet (9, 10, 11) and one delivery outlet (13, 14, 15) and the machine is characterised in that it comprises a ferromagnetic gear (2, 30) of axis DELTA p integral with the piston (1) and including Np teeth, located inside a ferromagnetic ring (6, 32) of axis DELTA c and integral with the capsule (5), the said ring being equipped with NB electric coils (20, 33) arranged radially, in that the ratio Np DIVIDED NB is equal to the ratio Sp DIVIDED Sc, and in that the NB electric coils (20, 33) of the said ring (6, 32) are powered in succession.
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公开(公告)号：FR2860385A1
公开(公告)日：2005-04-01
申请号：FR0311280
申请日：2003-09-26
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , RIVAL JEAN LUC , MORPAIN MATTHIEU
Abstract: The source has a radiation zone (3) situated in a radiation chamber (1) connected to turbomolecular pumps (11). A collector device (13) for collecting and conditioning extreme ultraviolet (EUV) radiation emitted by a radiation generating material, is placed in a transmission chamber (2) that is connected to turbomolecular pumps (12). The chamber (2) is connected to the chamber (1) through a diaphragm (4) having reduced dimension. The turbomolecular pumps (11) maintain a pressure that is higher than the pressure maintained by the turbomolecular pumps (12). The diaphragm is provided at proximity of the radiation zone (3) and is oriented along an optical axis. An independent claim is also included for a photolithography device comprising extreme ultraviolet radiation source.
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公开(公告)号：FR2703406B1
公开(公告)日：1995-05-12
申请号：FR9303906
申请日：1993-04-02
Applicant: CIT ALCATEL
Inventor： BARTHOD BENOIT , JEAN-PIERREPER DENIS CHICHERIE
Abstract: The machine comprises a cylindrical piston (1) of axis DELTA p, which is rotary and situated in a cylindrical capsule (5) of axis DELTA c, the piston (1) having a profile having Sp axes of symmetry, the said capsule (5) defining a hollow volume (4) of which the cross section through a plane perpendicular to its axis DELTA c, has Sc axes of symmetry, Sp and Sc being different from one another by one, the axes DELTA p and DELTA c, which are parallel, being separated by a distance E, the piston (1) and the capsule (5) delimiting between them at least three chambers (A, B, C) and the capsule including at least one suction inlet (9, 10, 11) and one delivery outlet (13, 14, 15) and the machine is characterised in that it comprises a ferromagnetic gear (2, 30) of axis DELTA p integral with the piston (1) and including Np teeth, located inside a ferromagnetic ring (6, 32) of axis DELTA c and integral with the capsule (5), the said ring being equipped with NB electric coils (20, 33) arranged radially, in that the ratio Np DIVIDED NB is equal to the ratio Sp DIVIDED Sc, and in that the NB electric coils (20, 33) of the said ring (6, 32) are powered in succession.
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