公开(公告)号：JP2001223263A

公开(公告)日：2001-08-17

申请号：JP2000374250

申请日：2000-12-08

Applicant: CIT ALCATEL

Inventor： CHEVALIER ERIC ,  ROLLAND BERNARD

IPC: B65G49/00 ,  F04B19/00 ,  H01L21/66 ,  H01L21/673 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To provide a system and a method for controlling a small-scale environment with which a sample is placed and preserved in an environment controlled as similar as possible to a process or use conditions for the sample. SOLUTION: This device contains an individual enclosure 1 that houses a sample 3 to separate from the outside. A micro pump array 5 combined with the individual enclosure 1 generates and keeps vacuum controlled in the individual enclosure 1. The sample 3 is put in/out from the individual enclosure 1 by a transportation means 6. A micro pump of the micro pump array 5 can be made a type operating by a heat transition action. A micro temperature sensor 8, a micro pressure sensor 9 and a gas analyzer 10 control operation of the micro pump array 5 through a mounted microcomputer 11.

公开(公告)号：JP2000214092A

公开(公告)日：2000-08-04

申请号：JP2000007613

申请日：2000-01-17

Applicant: CIT ALCATEL

Inventor： CHEVALIER ERIC ,  MAQUIN PHILIPPE ,  ROLLAND BERNARD

IPC: C23C16/52 ,  G01N21/68 ,  G01N21/73

Abstract: PROBLEM TO BE SOLVED: To provide a gas analysis system which is provided with a device used to ionize a gas to be analyzed, which is provided with a device used to analyze the ionized gas, and by which a gas inside an enclosure is analyzed under a controlled pressure. SOLUTION: As a device 2 and a device 6 which ionize a gas to be analyzed, a dedicated plasma source 2 coupled to a generator 6 which comes into contact with a gas contained inside an enclosure 3 and which generates a plasma from the gas to be analyzed is provided. Then, as a device 4 and a device 5 which analyze the ionized gas, a radiation sensor 4 connected to a spectrometer 5 which is situated near a region used to generate the plasma and which analyzes a change in a radiation spectrum emitted by the generated plasma is provided.