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    Mini-environment control system and method
    1.
    发明授权
    Mini-environment control system and method 失效
    迷你环境控制系统及方法

    公开(公告)号：US6422823B2

    公开(公告)日：2002-07-23

    申请号：US72977900

    申请日：2000-12-06

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND ,  CHEVALIER ERIC

    IPC: B65G49/00 ,  F04B19/00 ,  H01L21/66 ,  H01L21/673 ,  F04B49/00 ,  H01L21/302

    CPC classification number: H01L21/67393 ,  F04B19/006

    Abstract: A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sample into the individual enclosure and extract it therefrom. The micropumps of the array of micropumps can be of a type employing the thermal transpiration effect. Temperature and pressure microsensors and a gas analyzer enable the operation of the array of micropumps to be controlled by an onboard microcomputer. The atmosphere surrounding a sample is therefore controlled.

    Abstract translation: 微型环境控制装置包括一个独立的外壳，用于容纳样品并将其与外部环境隔离。 连接到各个外壳的一组微型泵产生并维持在单个外壳中的受控真空。 转移装置将样品引入单个外壳并从中提取。 微泵阵列的微泵可以是采用热蒸腾作用的类型。 温度和压力微传感器和气体分析仪使得微型阵列的操作能够由机载微型计算机控制。 因此控制样品周围的气氛。

    SYSTEM AND METHOD FOR CONTROLLING SMALL-SCALE ENVIRONMENT
    2.
    发明专利
    SYSTEM AND METHOD FOR CONTROLLING SMALL-SCALE ENVIRONMENT 失效

    公开(公告)号：JP2001223263A

    公开(公告)日：2001-08-17

    申请号：JP2000374250

    申请日：2000-12-08

    Applicant: CIT ALCATEL

    Inventor： CHEVALIER ERIC ,  ROLLAND BERNARD

    IPC: B65G49/00 ,  F04B19/00 ,  H01L21/66 ,  H01L21/673 ,  H01L21/68

    Abstract: PROBLEM TO BE SOLVED: To provide a system and a method for controlling a small-scale environment with which a sample is placed and preserved in an environment controlled as similar as possible to a process or use conditions for the sample. SOLUTION: This device contains an individual enclosure 1 that houses a sample 3 to separate from the outside. A micro pump array 5 combined with the individual enclosure 1 generates and keeps vacuum controlled in the individual enclosure 1. The sample 3 is put in/out from the individual enclosure 1 by a transportation means 6. A micro pump of the micro pump array 5 can be made a type operating by a heat transition action. A micro temperature sensor 8, a micro pressure sensor 9 and a gas analyzer 10 control operation of the micro pump array 5 through a mounted microcomputer 11.

    METHOD AND SYSTEM FOR DISCRIMINATION OF GASEOUS EFFLUENT AND FACILITY PROVIDED THEREWITH
    3.
    发明专利
    METHOD AND SYSTEM FOR DISCRIMINATION OF GASEOUS EFFLUENT AND FACILITY PROVIDED THEREWITH 失效

    公开(公告)号：JP2000214092A

    公开(公告)日：2000-08-04

    申请号：JP2000007613

    申请日：2000-01-17

    Applicant: CIT ALCATEL

    Inventor： CHEVALIER ERIC ,  MAQUIN PHILIPPE ,  ROLLAND BERNARD

    IPC: C23C16/52 ,  G01N21/68 ,  G01N21/73

    Abstract: PROBLEM TO BE SOLVED: To provide a gas analysis system which is provided with a device used to ionize a gas to be analyzed, which is provided with a device used to analyze the ionized gas, and by which a gas inside an enclosure is analyzed under a controlled pressure. SOLUTION: As a device 2 and a device 6 which ionize a gas to be analyzed, a dedicated plasma source 2 coupled to a generator 6 which comes into contact with a gas contained inside an enclosure 3 and which generates a plasma from the gas to be analyzed is provided. Then, as a device 4 and a device 5 which analyze the ionized gas, a radiation sensor 4 connected to a spectrometer 5 which is situated near a region used to generate the plasma and which analyzes a change in a radiation spectrum emitted by the generated plasma is provided.

    4.
    发明专利
    未知

    公开(公告)号：AT328310T

    公开(公告)日：2006-06-15

    申请号：AT01928019

    申请日：2001-04-20

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND ,  CHEVALIER ERIC ,  SOGAN GLORIA

    IPC: C23C16/44 ,  G05D16/20 ,  G05D27/02 ,  H01L21/00 ,  H01L21/205

    Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

    8.
    发明专利
    未知

    公开(公告)号：DE60120064T2

    公开(公告)日：2006-12-21

    申请号：DE60120064

    申请日：2001-04-20

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND ,  CHEVALIER ERIC ,  SOGAN GLORIA

    IPC: G05D27/02 ,  C23C16/44 ,  G05D16/20 ,  H01L21/00 ,  H01L21/205

    Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

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