公开(公告)号：JP2013075827A

公开(公告)日：2013-04-25

申请号：JP2012287644

申请日：2012-12-28

Applicant: Corning Inc ,  コーニング インコーポレイテッド

Inventor： BOOKBINDER DANA C ,  FIACCO RICHARD M ,  NEUKIRCH ULRICH

IPC: C03C3/06 ,  C03B8/02 ,  C03B20/00 ,  G02B1/02 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a synthetic silica material having a low level of polarization-induced birefringence, a low level of light-induced wavefront distortion, a high level of initial internal transmission, and method for making the same.SOLUTION: The disclosure includes OD-doped synthetic silica glass usable in optical elements for use in lithography at short wavelengths below about 300 nm. The OD-doped synthetic silica glass is found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also an optical member comprising such glass and lithographic systems including such optical member are disclosed. The glass is particularly suitable for immersion lithographic systems by virtue of the exceptionally low polarization-induced birefringence values at about 193 nm.

Abstract translation: 要解决的问题：提供具有低水平的偏振引起的双折射，低水平的光诱导波前失真，高水平的初始内部透射的合成二氧化硅材料及其制造方法。 解决方案：本公开包括可用于在低于约300nm的短波长下进行光刻的光学元件中的OD掺杂合成石英玻璃。 发现OD掺杂的合成石英玻璃具有比具有相当浓度的OH的非掺杂OD的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了包括这种玻璃的光学构件和包括这种光学构件的光刻系统。 由于在约193nm处的异常低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：CA2355678A1

公开(公告)日：2000-06-29

申请号：CA2355678

申请日：1999-11-30

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  HAWTOF DANIEL W ,  BORRELLI NICHOLAS F ,  FAJARDO JAMES C ,  FIACCO RICHARD M ,  WEST JAMES A

IPC: G02B6/02 ,  C03B37/012 ,  C03B37/028 ,  C03C13/04 ,  G02B6/024 ,  G02B6/036 ,  G02B6/18

Abstract: Disclosed is an optical waveguide fiber preform which is an assembly of one or more core rods (14) surrounded by a plurality of clad rods (10). The clad ro ds (10) have a central portion (12) and a surrounding layer (22), in which the refractive index of the central portion is lower than that of the surroundin g layer. The preform is drawn into an optical waveguide fiber that has a two component clad layer. Proper choice of the central portion (12) and surrounding layer provide a waveguide fiber that is endlessly single mode. Alternative embodiments include fibers containing dopants that enhance fiber photosensitivity or which provide stress-induced or asymmetric-refractive- index-induced birefringence in the waveguide fiber.

公开(公告)号：AU2003293097A1

公开(公告)日：2004-06-23

申请号：AU2003293097

申请日：2003-11-25

Applicant: CORNING INC

Inventor： BOOKBINDER DANA C ,  FIACCO RICHARD M ,  GIROUX CYNTHIA B

IPC: C01B7/07 ,  C01B7/20 ,  C01B9/00 ,  C01B33/107 ,  C03B37/014 ,  C01G17/04

Abstract: A method and apparatus for producing an optical fiber preform including a metal remover, which operates by adsorption, that removes gaseous transition metal impurities present in a process gas to be provided to a furnace for drying, doping or consolidation. The apparatus and method may reduce attenuation of the resultant optical fiber drawn from the preform.

公开(公告)号：AU4973100A

公开(公告)日：2000-11-10

申请号：AU4973100

申请日：2000-04-07

Applicant: CORNING INC

Inventor： BERKEY GEORGE E ,  BOOKBINDER DANA C ,  FIACCO RICHARD M ,  GIROUX CYNTHIA B ,  HAWTOF DANIEL W ,  POWERS DALE R ,  SIRKANT V

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/014 ,  C03C13/04 ,  G02B6/02 ,  C03B37/018 ,  G02B6/16

Abstract: A cylindrical glass body having a low water content centerline region and method of manufacturing such a cylindrical glass body for use in the manufacture of optical waveguide fiber is disclosed. The centerline region of the cylindrical glass body has a water content sufficiently low such that an optical waveguide fiber made from the cylindrical glass body of the present invention exhibits an optical attenuation of less than about 0.35 dB/km, and preferably less than about 0.31 dB/km at a measured wavelength of 1380 nm. A low water content plug used in the manufacture of such a cylindrical glass body, an optical waveguide fiber having a low water peak, and an optical fiber communication system incorporating such an optical waveguide fiber is also disclosed.

公开(公告)号：AU8376698A

公开(公告)日：1999-02-16

申请号：AU8376698

申请日：1998-06-24

Applicant: CORNING INC

Inventor： FIACCO RICHARD M ,  HACKERT MICHAEL J ,  HAWTOF DANIEL W ,  VANRYN TED M

IPC: C03B37/012 ,  G02B6/02 ,  G02B6/16

公开(公告)号：AT316944T

公开(公告)日：2006-02-15

申请号：AT00931925

申请日：2000-04-07

Applicant: CORNING INC

Inventor： BERKEY GEORGE E ,  BOOKBINDER DANA C ,  FIACCO RICHARD M ,  GIROUX CYNTHIA B ,  HAWTOF DANIEL W ,  POWERS DALE R ,  SIRKANT V

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/014 ,  C03C13/04 ,  G02B6/02 ,  C03B37/018

Abstract: A cylindrical glass body having a low water content centerline region and method of manufacturing such a cylindrical glass body for use in the manufacture of optical waveguide fiber is disclosed. The centerline region of the cylindrical glass body has a water content sufficiently low such that an optical waveguide fiber made from the cylindrical glass body of the present invention exhibits an optical attenuation of less than about 0.35 dB/km, and preferably less than about 0.31 dB/km at a measured wavelength of 1380 nm. A low water content plug used in the manufacture of such a cylindrical glass body, an optical waveguide fiber having a low water peak, and an optical fiber communication system incorporating such an optical waveguide fiber is also disclosed.

公开(公告)号：BR0009970A

公开(公告)日：2002-01-08

申请号：BR0009970

申请日：2000-04-07

Applicant: CORNING INC

Inventor： BERKEY GEORGE EDWARD ,  HAWTOF DANIEL WARREN ,  POWERS DALE ROBERT ,  GIROUX CYNTHIA B ,  SRIKANT V ,  BOOKBINDER DANA C ,  FIACCO RICHARD M

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/014 ,  C03C13/04 ,  G02B6/02 ,  C03B37/018 ,  G02B6/16

Abstract: A cylindrical glass body having a low water content centerline region and method of manufacturing such a cylindrical glass body for use in the manufacture of optical waveguide fiber is disclosed. The centerline region of the cylindrical glass body has a water content sufficiently low such that an optical waveguide fiber made from the cylindrical glass body of the present invention exhibits an optical attenuation of less than about 0.35 dB/km, and preferably less than about 0.31 dB/km at a measured wavelength of 1380 nm. A low water content plug used in the manufacture of such a cylindrical glass body, an optical waveguide fiber having a low water peak, and an optical fiber communication system incorporating such an optical waveguide fiber is also disclosed.

公开(公告)号：AU2003299138A1

公开(公告)日：2004-04-23

申请号：AU2003299138

申请日：2003-09-22

Applicant: CORNING INC

Inventor： KOHLI JEFFREY T ,  POWERS DALE R ,  BERKEY GEORGE E ,  BOOKBINDER DANA C ,  FIACCO RICHARD M

IPC: C03B37/014

Abstract: A method of forming an optical fiber preform that includes providing a consolidated glass preform, depositing a layer of silica soot onto the consolidated glass preform to form a composite preform having a consolidated glass portion and a silica soot portion, and exposing the composite preform to an atmosphere containing a concentration of a deuterium compound for a time and at a temperature sufficient to cause the deuterium compound to penetrate the consolidated glass portion without pervading the entire glass portion. Preferably, the deuterium compound penetrates the glass portion to a desired depth.

公开(公告)号：AU2002231031A1

公开(公告)日：2002-07-08

申请号：AU2002231031

申请日：2001-12-17

Applicant: CORNING INC

Inventor： BOOKBINDER DANA C ,  FIACCO RICHARD M ,  BERKEY GEORGE E ,  POWERS DALE R

IPC: C03B37/014 ,  C03C13/04 ,  C03C25/60 ,  G02B6/02 ,  G02B6/16

Abstract: Optical waveguide fiber having low water peak as well as optical waveguide fiber preforms and methods of making optical waveguide fiber preforms from which low water peak and/or low hydrogen aged attenuation optical waveguide fibers are formed, including optical waveguide fiber and preforms made via OVD. The fibers may be hydrogen resistant, i.e. exhibit low hydrogen aged attenuation. A low water peak, hydrogen resistant optical waveguide fiber is disclosed which exhibits an optical attenuation at a wavelength of about 1383 nm which is less than or equal to an optical attenuation exhibited at a wavelength of about 1310 nm.

公开(公告)号：CA2371249A1

公开(公告)日：2000-11-02

申请号：CA2371249

申请日：2000-04-07

Applicant: CORNING INC

Inventor： SIRKANT V ,  HAWTOF DANIEL W ,  BERKEY GEORGE E ,  POWERS DALE R ,  BOOKBINDER DANA C ,  GIROUX CYNTHIA B ,  FIACCO RICHARD M

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/014 ,  C03C13/04 ,  G02B6/02 ,  C03B37/018 ,  G02B6/16

Abstract: A cylindrical glass body having a low water content centerline region and method of manufacturing such a cylindrical glass body for use in the manufacture of optical waveguide fiber is disclosed. The centerline region o f the cylindrical glass body has a water content sufficiently low such that an optical waveguide fiber made from the cylindrical glass body of the present invention exhibits an optical attenuation of less than about 0.35 dB/km, and preferably less than about 0.31 dB/km at a measured wavelength of 1380nm. A low water content plug (46, 54) used in the manufacture of such a cylindrica l glass body, an optical waveguide fiber having a low water peak, and an optic al fiber communication system incorporating such an optical waveguide fiber is also disclosed.