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1.发明申请PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS WITH LOW STRESS SENSITIVITY AND METHODS OF FABRICATION 审中-公开具有低应力灵敏度的压电微型超声波传感器和制造方法
公开(公告)号：WO2016106153A1
公开(公告)日：2016-06-30
申请号：PCT/US2015/066906
申请日：2015-12-18
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： GUEDES, Andre , PRZYBYLA, Richard , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G01N29/2437 , B06B1/0651 , G01N2291/0427 , G10K13/00
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract translation: 压电微加工超声波换能器（pMUT）装置可以包括压电膜换能器，其被设计为对残留应力具有较低的灵敏度，并降低由用于释放膜的背面蚀刻工艺引起的对几何变化的敏感性。 这些设计允许调整其一些关键特征，以实现所需的特性，如压力灵敏度，固有频率，应力灵敏度和带宽。
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2.发明申请PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS HAVING STRESS RELIEF FEATURES 审中-公开具有应力消除特性的压电微机械超声换能器
公开(公告)号：WO2017218299A1
公开(公告)日：2017-12-21
申请号：PCT/US2017/036613
申请日：2017-06-08
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： HORSLEY, David , GUEDES, Andre , SHELTON, Stefon , PRZYBYLA, Richard
Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.
Abstract translation: 公开了压电微机械超声换能器（PMUT）。 该设备由一个柔性膜组成，通过弯曲连接到一个刚性基板。 挠曲部分由蚀刻穿过膜周边的狭缝限定。 这些特征释放了膜结构层上存在的应力，使其对残余应力不太敏感。 挠曲件被设计成用作扭转弹簧，使得膜片的振动模式形状在压电致动区域中高度弯曲，从而增加机电耦合。
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公开(公告)号：WO2021252268A1
公开(公告)日：2021-12-16
申请号：PCT/US2021/035755
申请日：2021-06-03
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： PRZYBYLA, Richard , RICCARDI, Sebastien , LACHAL, Benoît
Abstract: A method, system and computer readable medium for Ultrasound contact tracing comprising receiving one or more advertise messages determining a base station from the one or more advertise messages wherein the base station generates a broadcast order from at least the one or more advertise messages. A broadcast order is determined and an ultrasound message is sent according to the broadcast order. A detection period for ultrasound messages is initiated according to the broadcast order and a user may be notified of a detected ultrasound message.
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4.发明申请
公开(公告)号：WO2015171224A1
公开(公告)日：2015-11-12
申请号：PCT/US2015/024114
申请日：2015-04-02
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： SHELTON, Stefon , GUEDES, Andre , PRZYBYLA, Richard , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: H03H9/174 , B06B1/0603 , H01L41/0926 , H01L41/0973 , H01L41/187 , H01L41/1873 , H01L41/1876 , H03H9/02244 , H03H9/178 , H03H2009/155 , H04R17/00
Abstract: A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.
Abstract translation: 传感器包括由相应的不同的第一和第二压电材料制成的第一和第二压电层，以及三个或更多个电极，其实施在两个或多个导电电极层中。 第一压电层夹在第一对电极之间，第二压电层夹在第二对电极之间。 第一和第二对电极包含不超过一对两对电极。
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5.发明公开
公开(公告)号：EP3216231A2
公开(公告)日：2017-09-13
申请号：EP15856698.4
申请日：2015-11-06
Applicant: Chirp Microsystems, Inc.
Inventor： PRZYBYLA, Richard , GUEDES, Andre , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G10K11/002 , G01S7/521 , G01S15/10 , G10K11/346 , H04R3/04 , H04R17/00 , H04R29/002 , H04R29/005 , H04R2201/003 , H04R2217/03
Abstract: A system and method use an array of ultrasonic transducers to emit and receive sound in a phased array fashion by using acoustic waveguides to achieve a desired acoustic radiation and reception pattern. A chip package attached to an acoustic transducer array includes acoustic waveguides coupled to acoustic ports. Each waveguide is coupled between a corresponding acoustic transducer and a corresponding acoustic port. A spacing of a pair of acoustic ports is different than a spacing of a corresponding pair of acoustic transducers.
Abstract translation: 系统和方法使用超声换能器阵列通过使用声波导来以相控阵方式发射和接收声音以实现期望的声辐射和接收模式。 连接到声学换能器阵列的芯片封装包括耦合到声学端口的声波导。 每个波导耦合在相应的声学换能器与相应的声学端口之间。 一对声学端口的间隔不同于相应的一对声学换能器的间隔。
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Patent Agency Ranking6.发明公开PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS WITH LOW STRESS SENSITIVITY AND METHODS OF FABRICATION 审中-公开低应力灵敏度的压电微机械超声换能器及其制造方法
公开(公告)号：EP3233311A1
公开(公告)日：2017-10-25
申请号：EP15874212.2
申请日：2015-12-18
Applicant: Chirp Microsystems, Inc.
Inventor： GUEDES, Andre , PRZYBYLA, Richard , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G01N29/2437 , B06B1/0651 , G01N2291/0427 , G10K13/00
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract translation: 压电微机械超声换能器（pMUT）装置可以包括压电膜换能器，该换能器被设计成对残余应力具有较低的灵敏度并且对由用于释放膜的背面蚀刻过程引起的对几何变化的敏感度降低。 这些设计允许调整其某些关键特性以实现所需特性，如压力灵敏度，固有频率，应力敏感度和带宽。
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公开(公告)号：EP3175490A1
公开(公告)日：2017-06-07
申请号：EP15827176.7
申请日：2015-07-31
Applicant: Chirp Microsystems Inc.
Inventor： HORSLEY, David , GUEDES, Andre , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
CPC classification number: G01S15/10 , B06B1/0215 , B06B1/0292 , B06B1/0644 , B06B1/0651 , B06B2201/51 , B06B2201/55 , B06B2201/70 , B81B3/0021 , G01S7/521 , G01S7/524 , G01S7/527 , G01S15/04 , G01S15/46 , G01S15/87 , G01S2015/465
Abstract: A miniature rangefinder includes a housing, a micromachined ultrasonic transducer, and signal processing circuitry. The housing includes a substrate and a lid. The housing has one or more apertures and the micromachined ultrasonic transducer is mounted over an aperture. The micromachined ultrasonic transducer may function as both a transmitter and a receiver. An integrated circuit is configured to drive the transducer to transmit an acoustic signal, detect a return signal, and determine a time of flight between emitting the acoustic signal and detecting the return signal.
Abstract translation: 微型测距仪包括一个外壳，一个微机械超声波换能器和信号处理电路。 壳体包括基板和盖子。 壳体具有一个或多个孔，并且微机械超声换能器安装在孔上。 微机械超声波换能器既可以用作发射器又可以用作接收器。 集成电路被配置为驱动换能器发送声信号，检测返回信号并且确定在发射声信号和检测返回信号之间的飞行时间。
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公开(公告)号：EP3216231B1
公开(公告)日：2019-08-21
申请号：EP15856698.4
申请日：2015-11-06
Applicant: Chirp Microsystems, Inc.
Inventor： PRZYBYLA, Richard , GUEDES, Andre , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
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9.发明公开
公开(公告)号：EP3201122A1
公开(公告)日：2017-08-09
申请号：EP15846584.9
申请日：2015-10-01
Applicant: Chirp Microsystems Inc.
Inventor： GUEDES, Andre , HORSLEY, David , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
IPC: B81B3/00 , H01L41/04 , H01L41/113 , G01N29/24
CPC classification number: B06B1/0625 , B06B1/0603 , B81B3/00 , G01N29/2437 , G10K9/125 , G10K13/00 , H01L41/33 , H03H9/2447
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.
Abstract translation: 压电微机械超声换能器（PMUT）装置包括具有穿过其中的开口的衬底以及在开口上方附着到衬底的膜。 覆盖开口的膜的一部分被分成多个悬臂，这些悬臂机械耦合，使得悬臂以共同频率谐振。
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公开(公告)号：EP3140869B1
公开(公告)日：2019-06-05
申请号：EP15789257.1
申请日：2015-04-02
Applicant: Chirp Microsystems, Inc.
Inventor： SHELTON, Stefon , GUEDES, Andre , PRZYBYLA, Richard , KIANG, Meng-Hsiung , HORSLEY, David
IPC: H01L41/187 , H01L41/09 , B06B1/06
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