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1.发明申请PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS WITH LOW STRESS SENSITIVITY AND METHODS OF FABRICATION 审中-公开具有低应力灵敏度的压电微型超声波传感器和制造方法
公开(公告)号：WO2016106153A1
公开(公告)日：2016-06-30
申请号：PCT/US2015/066906
申请日：2015-12-18
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： GUEDES, Andre , PRZYBYLA, Richard , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G01N29/2437 , B06B1/0651 , G01N2291/0427 , G10K13/00
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract translation: 压电微加工超声波换能器（pMUT）装置可以包括压电膜换能器，其被设计为对残留应力具有较低的灵敏度，并降低由用于释放膜的背面蚀刻工艺引起的对几何变化的敏感性。 这些设计允许调整其一些关键特征，以实现所需的特性，如压力灵敏度，固有频率，应力灵敏度和带宽。
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公开(公告)号：WO2016106154A1
公开(公告)日：2016-06-30
申请号：PCT/US2015/066910
申请日：2015-12-18
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： HORSLEY, David , GUEDES, Andre , KIANG, Meng-Hsiung , PRZBYLA, Richard , SHELTON, Stefon
IPC: H04S7/00
Abstract: An ultrasonic time of flight range sensor is based on an array of two or more ultrasound transducers that are arranged as an endfire phased array. The acoustic beam profile of the array can be shaped using two degrees of freedom: the distance between the transducers of the array and the electronic delay applied to the transducers' outputs. This allows the array to have a more directional response, so that objects in a desired direction can be detected while objects in other directions are ignored. Differential measurements are used to reduce or cancel the ring-down signal that follows transmission. This ring-down cancellation is important in micromachined ultrasonic transducers that typically have narrow bandwidth and therefore poor pulse response. The differential endfire array can be used for ultrasonic rangefinding and object detection in consumer electronics devices such as smart phones, tablets, personal computers, monitors, and display devices.
Abstract translation: 飞行距离传感器的超声时间基于被布置为端火相控阵列的两个或更多个超声换能器的阵列。 可以使用两个自由度来形成阵列的声束轮廓：阵列的换能器之间的距离和施加到换能器输出的电子延迟。 这允许阵列具有更多的定向响应，使得可以检测到在其他方向上的对象被忽略的期望方向上的对象。 差分测量用于减少或取消传输后的减振信号。 这种减振取消对于通常具有窄带宽并因此差的脉冲响应的微机械超声波换能器是重要的。 差分端火阵列可用于诸如智能电话，平板电脑，个人计算机，监视器和显示设备的消费电子设备中的超声波测距和物体检测。
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3.发明申请
公开(公告)号：WO2015171224A1
公开(公告)日：2015-11-12
申请号：PCT/US2015/024114
申请日：2015-04-02
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： SHELTON, Stefon , GUEDES, Andre , PRZYBYLA, Richard , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: H03H9/174 , B06B1/0603 , H01L41/0926 , H01L41/0973 , H01L41/187 , H01L41/1873 , H01L41/1876 , H03H9/02244 , H03H9/178 , H03H2009/155 , H04R17/00
Abstract: A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.
Abstract translation: 传感器包括由相应的不同的第一和第二压电材料制成的第一和第二压电层，以及三个或更多个电极，其实施在两个或多个导电电极层中。 第一压电层夹在第一对电极之间，第二压电层夹在第二对电极之间。 第一和第二对电极包含不超过一对两对电极。
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4.发明公开
公开(公告)号：EP3216231A2
公开(公告)日：2017-09-13
申请号：EP15856698.4
申请日：2015-11-06
Applicant: Chirp Microsystems, Inc.
Inventor： PRZYBYLA, Richard , GUEDES, Andre , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G10K11/002 , G01S7/521 , G01S15/10 , G10K11/346 , H04R3/04 , H04R17/00 , H04R29/002 , H04R29/005 , H04R2201/003 , H04R2217/03
Abstract: A system and method use an array of ultrasonic transducers to emit and receive sound in a phased array fashion by using acoustic waveguides to achieve a desired acoustic radiation and reception pattern. A chip package attached to an acoustic transducer array includes acoustic waveguides coupled to acoustic ports. Each waveguide is coupled between a corresponding acoustic transducer and a corresponding acoustic port. A spacing of a pair of acoustic ports is different than a spacing of a corresponding pair of acoustic transducers.
Abstract translation: 系统和方法使用超声换能器阵列通过使用声波导来以相控阵方式发射和接收声音以实现期望的声辐射和接收模式。 连接到声学换能器阵列的芯片封装包括耦合到声学端口的声波导。 每个波导耦合在相应的声学换能器与相应的声学端口之间。 一对声学端口的间隔不同于相应的一对声学换能器的间隔。
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公开(公告)号：EP3216231B1
公开(公告)日：2019-08-21
申请号：EP15856698.4
申请日：2015-11-06
Applicant: Chirp Microsystems, Inc.
Inventor： PRZYBYLA, Richard , GUEDES, Andre , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
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Patent Agency Ranking6.发明公开
公开(公告)号：EP3201122A1
公开(公告)日：2017-08-09
申请号：EP15846584.9
申请日：2015-10-01
Applicant: Chirp Microsystems Inc.
Inventor： GUEDES, Andre , HORSLEY, David , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
IPC: B81B3/00 , H01L41/04 , H01L41/113 , G01N29/24
CPC classification number: B06B1/0625 , B06B1/0603 , B81B3/00 , G01N29/2437 , G10K9/125 , G10K13/00 , H01L41/33 , H03H9/2447
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.
Abstract translation: 压电微机械超声换能器（PMUT）装置包括具有穿过其中的开口的衬底以及在开口上方附着到衬底的膜。 覆盖开口的膜的一部分被分成多个悬臂，这些悬臂机械耦合，使得悬臂以共同频率谐振。
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公开(公告)号：EP3140869B1
公开(公告)日：2019-06-05
申请号：EP15789257.1
申请日：2015-04-02
Applicant: Chirp Microsystems, Inc.
Inventor： SHELTON, Stefon , GUEDES, Andre , PRZYBYLA, Richard , KIANG, Meng-Hsiung , HORSLEY, David
IPC: H01L41/187 , H01L41/09 , B06B1/06
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8.发明公开MICROMACHINED ULTRASOUND TRANSDUCER USING MULTIPLE PIEZOELECTRIC MATERIALS 审中-公开枸橼酸TER TER TER TER EN EN EN EN EN EN EN EN EN EN EN EN EN EN EN EN EN EN EN EN
公开(公告)号：EP3140869A1
公开(公告)日：2017-03-15
申请号：EP15789257.1
申请日：2015-04-02
Applicant: Chirp Microsystems Inc.
Inventor： SHELTON, Stefon , GUEDES, Andre , PRZYBYLA, Richard , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: H03H9/174 , B06B1/0603 , H01L41/0973 , H01L41/187 , H01L41/1873 , H01L41/1876 , H03H9/02244 , H03H9/178 , H03H2009/155 , H04R17/00
Abstract: A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.
Abstract translation: 传感器包括由相应的不同的第一和第二压电材料制成的第一和第二压电层以及在两个或多个导电电极层中实现的三个或更多个电极。 第一压电层夹在第一对电极之间，第二压电层夹在第二对电极之间。 第一对和第二对电极包含不超过一对两个电极，这两个电极是共同的。
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9.发明公开PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS WITH LOW STRESS SENSITIVITY AND METHODS OF FABRICATION 审中-公开低应力灵敏度的压电微机械超声换能器及其制造方法
公开(公告)号：EP3233311A1
公开(公告)日：2017-10-25
申请号：EP15874212.2
申请日：2015-12-18
Applicant: Chirp Microsystems, Inc.
Inventor： GUEDES, Andre , PRZYBYLA, Richard , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G01N29/2437 , B06B1/0651 , G01N2291/0427 , G10K13/00
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract translation: 压电微机械超声换能器（pMUT）装置可以包括压电膜换能器，该换能器被设计成对残余应力具有较低的灵敏度并且对由用于释放膜的背面蚀刻过程引起的对几何变化的敏感度降低。 这些设计允许调整其某些关键特性以实现所需特性，如压力灵敏度，固有频率，应力敏感度和带宽。
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公开(公告)号：EP3175490A1
公开(公告)日：2017-06-07
申请号：EP15827176.7
申请日：2015-07-31
Applicant: Chirp Microsystems Inc.
Inventor： HORSLEY, David , GUEDES, Andre , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
CPC classification number: G01S15/10 , B06B1/0215 , B06B1/0292 , B06B1/0644 , B06B1/0651 , B06B2201/51 , B06B2201/55 , B06B2201/70 , B81B3/0021 , G01S7/521 , G01S7/524 , G01S7/527 , G01S15/04 , G01S15/46 , G01S15/87 , G01S2015/465
Abstract: A miniature rangefinder includes a housing, a micromachined ultrasonic transducer, and signal processing circuitry. The housing includes a substrate and a lid. The housing has one or more apertures and the micromachined ultrasonic transducer is mounted over an aperture. The micromachined ultrasonic transducer may function as both a transmitter and a receiver. An integrated circuit is configured to drive the transducer to transmit an acoustic signal, detect a return signal, and determine a time of flight between emitting the acoustic signal and detecting the return signal.
Abstract translation: 微型测距仪包括一个外壳，一个微机械超声波换能器和信号处理电路。 壳体包括基板和盖子。 壳体具有一个或多个孔，并且微机械超声换能器安装在孔上。 微机械超声波换能器既可以用作发射器又可以用作接收器。 集成电路被配置为驱动换能器发送声信号，检测返回信号并且确定在发射声信号和检测返回信号之间的飞行时间。
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