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公开(公告)号：NO960583A
公开(公告)日：1996-10-08
申请号：NO960583
申请日：1996-02-14
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , O'NEAL HALL II HOLLIS
CPC classification number: G01J3/45 , G01J3/4535 , G01J9/02
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公开(公告)号：NO960583D0
公开(公告)日：1996-02-14
申请号：NO960583
申请日：1996-02-14
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , O'NEAL HALL II HOLLIS
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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公开(公告)号：NO960583L
公开(公告)日：1996-10-08
申请号：NO960583
申请日：1996-02-14
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , O'NEAL HALL II HOLLIS
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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