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公开(公告)号：JP2003185503A
公开(公告)日：2003-07-03
申请号：JP2002296901
申请日：2002-10-10
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL II
Abstract: PROBLEM TO BE SOLVED: To provide an optical filter for an interferometer system for supplying a reference beam not relatively receiving the effect of aberration and capable of monitoring alignment. SOLUTION: This interferometer 10 includes a beamsplitter 32 for splitting a source beam into a test beam 40 and the reference beam 42, an imaging device 24 for detecting an interference pattern, a mirror 38 for reflecting the test beam toward the imaging device, a micromirror 44 for reflecting a portion of the reference beam toward the imaging device and a focusing mechanism 34 for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. COPYRIGHT: (C)2003,JPO
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2.发明专利
公开(公告)号：JP2003177006A
公开(公告)日：2003-06-27
申请号：JP2002280156
申请日：2002-09-26
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL II
Abstract: PROBLEM TO BE SOLVED: To provide an adjustable optical system that determines aberration in a source beam by comparing a test beam with a reference beam. SOLUTION: This optical system includes a test source for producing the source beam having a spatial intensity distribution including an aberration component, a wavefront analyzer for processing a fringe signal associated with the aberration component, and an interferometer interposed between the test source and wavefront analyzer. The interferometer includes a beamsplitter for splitting the source beam into the test beam and reference beam, a mirror disposed in the test beam path, and a micromirror disposed in the interference beam path. The micromirror reflects a central position of the ference beam toward an imaging device and allows an outer portion of the reference beam to pass thereby. Therefore, this optical system is not affected by the aberration existing in the source beam. COPYRIGHT: (C)2003,JPO
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公开(公告)号：EP0814331A2
公开(公告)日：1997-12-29
申请号：EP97116978
申请日：1996-03-19
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL
CPC classification number: G01J3/45 , G01J3/4535 , G01J9/02
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
Abstract translation: 干涉仪包括用于将源束分裂成测试光束和参考光束的分束器，用于检测干涉图案的成像装置，设置在测试光束的路径中以用于将测试光束反射到成像装置的反射镜， 设置在参考光束的路径中以将参考光束的一部分反射到成像装置的微镜;以及聚焦机构，设置用于将参考光束聚焦在微镜上。 微镜的横向尺寸不超过由聚焦机构聚焦在其上的参考光束的中心波瓣的近似侧向尺寸。 用于减小光束中的像差影响的空间滤光器包括设置在透明基底上的反射器，其中反射器的横向尺寸不超过聚焦在反射器上的光束的空间强度分布的中心波瓣的大致侧向尺寸。 还提供了一种在波前测量系统中对波束进行滤波的方法。 该方法包括聚焦光束，反射聚焦光束的特定第一部分，以及透射光束的第二部分。
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公开(公告)号：DK0736759T3
公开(公告)日：2000-06-13
申请号：DK96301860
申请日：1996-03-19
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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公开(公告)号：HK1012704A1
公开(公告)日：1999-08-06
申请号：HK98114014
申请日：1998-12-18
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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Patent Agency Ranking
公开(公告)号：AU4578896A
公开(公告)日：1996-10-17
申请号：AU4578896
申请日：1996-02-29
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL II
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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公开(公告)号：NO960583A
公开(公告)日：1996-10-08
申请号：NO960583
申请日：1996-02-14
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , O'NEAL HALL II HOLLIS
CPC classification number: G01J3/45 , G01J3/4535 , G01J9/02
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公开(公告)号：AT201265T
公开(公告)日：2001-06-15
申请号：AT97116978
申请日：1996-03-19
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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公开(公告)号：ES2142023T3
公开(公告)日：2000-04-01
申请号：ES96301860
申请日：1996-03-19
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , HALL HOLLIS O'NEAL
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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公开(公告)号：NO960583D0
公开(公告)日：1996-02-14
申请号：NO960583
申请日：1996-02-14
Applicant: DISCOVISION ASS
Inventor： PRIKRYL IVAN , O'NEAL HALL II HOLLIS
Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.
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