Polymer comprising end groups containing photoacid generator, photoresist comprising polymer, and method of making device
    7.
    发明专利
    Polymer comprising end groups containing photoacid generator, photoresist comprising polymer, and method of making device 有权
    包含光致发生器的端部聚合物,包含聚合物的光电聚合物的聚合物,以及制造装置的方法

    公开(公告)号:JP2014065896A

    公开(公告)日:2014-04-17

    申请号:JP2013169366

    申请日:2013-08-19

    Abstract: PROBLEM TO BE SOLVED: To provide an acrylate-based polymer which has narrow distributions of compositions and molecular weights and is excellent in resolution when used as a photoresist.SOLUTION: A polymer is produced using: unsaturated monomers comprising an acid-deprotectable monomer, a base-soluble monomer, a lactone-containing monomer, a photoacid-generating monomer, or a combination comprising at least one of said monomers; anda dithioester compound represented in a simplified form by the specified formula (I) as a chain transfer agent for reversible addition fragmentation transfer polymerization (RAFT). (in the formula (I), Z is a y-valent Corganic group, L is a heteroatom or a single bond, and y is an integer between 1 and 6.) Also disclosed are a photoresist composition comprising the polymer, a coated substrate comprising a layer of the composition, and a method of forming an electronic device from the photoresist.

    Abstract translation: 要解决的问题:提供一种丙烯酸酯基聚合物,其具有窄的组成和分子量分布,并且在用作光致抗蚀剂时分辨率优异。溶液:使用以下方法制备聚合物:不饱和单体,其包含酸可去保护的单体, 碱溶性单体,含内酯单体,产生光酸的单体或包含至少一种所述单体的组合; 和以指定式(I)表示的简化形式的二硫代酯化合物作为用于可逆加成断裂转移聚合(RAFT)的链转移剂。 (在式(I)中,Z为Y价的Corganic基团,L为杂原子或单键,y为1至6之间的整数。)还公开了一种光致抗蚀剂组合物,其包含聚合物, 包括所述组合物的层,以及从所述光致抗蚀剂形成电子器件的方法。

    TETRA-FUNCTIONAL LONG-CHAIN BRANCHED ETHYLENE-BASED POLYMERS

    公开(公告)号:SG11202102963UA

    公开(公告)日:2021-04-29

    申请号:SG11202102963U

    申请日:2019-09-27

    Abstract: Ethylene-based polymers of this disclosure include a melt viscosity ratio (V0.1/V100) at 190° C. of at least 10, where V0.1 is the viscosity of the ethylene-based polymer at 190° C. at a shear rate of 0.1 radians/second, and V100 is the viscosity of the ethylene-based polymer at 190° C. at a shear rate of 100 radians/second; and a molecular weight tail quantified by an MWD area metric, ATAIL, and ATAIL is less than or equal to 0.04 as determined by gel permeation chromatography using a triple detector.

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