公开(公告)号：EP1792871A2

公开(公告)日：2007-06-06

申请号：EP06077085.6

申请日：2006-11-23

Applicant: Delphi Technologies, Inc.

Inventor： Dewes, Brian E. ,  Dewes, Denise R. ,  Harlan, Richard D.

IPC: B81C5/00

CPC classification number: G01M3/40 ,  B81C99/0045 ,  G01R31/2896 ,  H01L22/12

Abstract: A method and structure use characteristics of a plasma discharge for verifying a hermetic seal. The plasma discharge is created in a hermetically sealed cavity by a pair of spaced electrodes that extend from tips inside the hermetically sealed cavity to contacts outside the sealed cavity. An electrical bias is applied to the contacts that is sufficient to create a plasma discharge in a properly hermetically sealed cavity but not in an unsealed cavity.

Abstract translation: 用于验证气密密封的等离子体放电的方法和结构使用特性。 等离子体放电通过一对间隔开的电极在气密密封的腔中产生，该电极从气密密封腔内的尖端延伸以接触密封空腔外部。 电气偏压被施加到触点上，足以在适当的气密密封腔中产生等离子体放电，但不在未密封腔中。

公开(公告)号：EP1792871A3

公开(公告)日：2012-05-02

申请号：EP06077085.6

申请日：2006-11-23

Applicant: Delphi Technologies, Inc.

Inventor： Dewes, Brian E. ,  Dewes, Denise R. ,  Harlan, Richard D.

IPC: B81C99/00 ,  G01M3/40

CPC classification number: G01M3/40 ,  B81C99/0045 ,  G01R31/2896 ,  H01L22/12

Abstract: A method and structure use characteristics of a plasma discharge for verifying a hermetic seal. The plasma discharge is created in a hermetically sealed cavity by a pair of spaced electrodes that extend from tips inside the hermetically sealed cavity to contacts outside the sealed cavity. An electrical bias is applied to the contacts that is sufficient to create a plasma discharge in a properly hermetically sealed cavity but not in an unsealed cavity.

公开(公告)号：EP1780522A1

公开(公告)日：2007-05-02

申请号：EP06076891.8

申请日：2006-10-18

Applicant: Delphi Technologies, Inc.

Inventor： Dewes, Brian E. ,  Castillo-Borelly, Pedro E. ,  Christenson, John C. ,  Rich, David B.

IPC: G01J5/12 ,  B81B3/00

CPC classification number: G01J5/12 ,  G01J5/0225

Abstract: An infrared (IR) sensor (200) includes a semiconductor material (210), a circular membrane (204) and a thermopile (206A). The semiconductor material (210) includes a cavity (205) surrounded by a frame (212). The circular membrane (204) is positioned over the cavity (205) and has a perimeter supported by the frame (212). The membrane (204) has a first surface for receiving thermal radiation and an oppositely-disposed second surface. The membrane (204) includes at least one infrared absorbing layer (550). The thermopile (206A) includes a plurality of serially connected thermocouples. Each of the thermocouples has dissimilar electrically-resistive materials that define measurement junctions (209), which are positioned on the membrane (204), and reference junctions (207), which are positioned on the frame (212).

Abstract translation: 红外（IR）传感器（200）包括半导体材料（210），圆形膜（204）和热电堆（206A）。 半导体材料（210）包括被框架（212）包围的空腔（205）。 圆形膜（204）定位在空腔（205）上方并且具有由框架（212）支撑的周边。 膜（204）具有用于接收热辐射的第一表面和相对布置的第二表面。 膜（204）包括至少一个红外线吸收层（550）。 热电堆206A包括多个串联连接的热电偶。 每个热电偶具有不同的电阻材料，其限定位于膜（204）上的测量接头（209）和位于框架（212）上的参考接头（207）。