公开(公告)号：US20220406633A1

公开(公告)日：2022-12-22

申请号：US17787565

申请日：2020-12-21

Applicant: EBARA CORPORATION

Inventor： Michiaki MATSUDA ,  Hisajiro NAKANO ,  Fuyuki OGAKI ,  Yusuke WATANABE ,  Junji KUNISAWA

IPC: H01L21/67 ,  B08B1/00 ,  B08B1/02 ,  B08B3/02 ,  B08B13/00

Abstract: A cleaning device includes: a plurality of rollers that hold a peripheral edge part of a substrate; a rotation driving unit that rotates the substrate by rotationally driving the plurality of rollers; a cleaning member that abuts on the substrate and cleans the substrate; a cleaning liquid supply nozzle that supplies a cleaning liquid to the substrate; a microphone that detects a sound generated when a notch of the peripheral edge part of the substrate hits the plurality of rollers; and a rotation speed calculation unit that calculates a rotation speed of the substrate on the basis of the sound detected by the microphone.

公开(公告)号：US20250108416A1

公开(公告)日：2025-04-03

申请号：US18895237

申请日：2024-09-24

Applicant: EBARA CORPORATION

Inventor： Fuyuki OGAKI ,  Yusuke WATANABE ,  Michiaki MATSUDA ,  Kohei WAKUI ,  Kiyoshi SUZUKI

IPC: B08B13/00 ,  B08B1/34 ,  B24B37/34

Abstract: Provided is a rotation speed calculation apparatus including: a first vibration sensor configured to detect a vibration generated when a notch in a peripheral edge portion of a substrate to be cleaned hits a roller holding the peripheral edge portion of the substrate when the substrate is rotated by driving the roller to rotate; a second vibration sensor configured to detect a vibration of a housing defining a space in which the substrate is cleaned; and a rotation speed calculator configured to calculate a rotation speed of the substrate based on the vibration detected by the first vibration sensor and the vibration detected by the second vibration sensor.