公开(公告)号：US20190015801A1

公开(公告)日：2019-01-17

申请号：US16069862

申请日：2017-01-13

Applicant: EBARA CORPORATION

Inventor： Suguru OZAWA ,  Yoichi NAKAGAWA ,  Muneto TAKAHASHI ,  Tao XU ,  Toshio YOKOYAMA

IPC: B01F15/02 ,  B01F3/08 ,  B01F3/04

Abstract: Provided is a supply-liquid producing apparatus capable of producing a supply liquid by an amount needed at a use point.A supply-liquid producing apparatus includes a mixer that mixes water and ozone gas to produce ozone water; a booster pump that increases the pressure of the water supplied to the mixer; a gas-liquid separation tank that separates the ozone water produced by the mixer into ozone water to be supplied to a use point and exhaust gas to be discharged from an exhaust port; a flowmeter that measures the flow rate of the ozone water supplied from the gas-liquid separation tank to the use point; a flow control unit that adjusts the flow rate of the water supplied to the mixer by controlling the booster pump in response to the flow rate of the ozone water measured by the flowmeter; and an exhaust pressure control unit that controls the exhaust pressure to keep constant the water level in the gas-liquid separation tank.