公开(公告)号：US20190015801A1

公开(公告)日：2019-01-17

申请号：US16069862

申请日：2017-01-13

Applicant: EBARA CORPORATION

Inventor： Suguru OZAWA ,  Yoichi NAKAGAWA ,  Muneto TAKAHASHI ,  Tao XU ,  Toshio YOKOYAMA

IPC: B01F15/02 ,  B01F3/08 ,  B01F3/04

Abstract: Provided is a supply-liquid producing apparatus capable of producing a supply liquid by an amount needed at a use point.A supply-liquid producing apparatus includes a mixer that mixes water and ozone gas to produce ozone water; a booster pump that increases the pressure of the water supplied to the mixer; a gas-liquid separation tank that separates the ozone water produced by the mixer into ozone water to be supplied to a use point and exhaust gas to be discharged from an exhaust port; a flowmeter that measures the flow rate of the ozone water supplied from the gas-liquid separation tank to the use point; a flow control unit that adjusts the flow rate of the water supplied to the mixer by controlling the booster pump in response to the flow rate of the ozone water measured by the flowmeter; and an exhaust pressure control unit that controls the exhaust pressure to keep constant the water level in the gas-liquid separation tank.

公开(公告)号：US20220105478A1

公开(公告)日：2022-04-07

申请号：US17488814

申请日：2021-09-29

Applicant: EBARA CORPORATION

Inventor： Suguru OZAWA ,  Yuji ARAKI ,  Toshifumi WATANABE ,  Yoichi NAKAGAWA ,  Risa KIMURA ,  Tao XU

IPC: B01F3/04 ,  B01F3/20 ,  B01F3/22 ,  B01F5/10 ,  B01F5/04 ,  B01F15/02 ,  B01F15/00 ,  B01D19/00

Abstract: A gas solution supply device 1 includes: a first gas-liquid separator 8 in which gas solution is stored; a second gas-liquid separator 16 provided at a stage subsequent to the first gas-liquid separator 8 and in which gas solution to be supplied to a use point is stored; an intermediate line 17 provided between the first gas-liquid separator 8 and the second gas-liquid separator 16; a pressure booster pump 18 provided on the intermediate line 17 and increases a pressure of gas solution being supplied from the first gas-liquid separator 8 to the second gas-liquid separator 16; a gas supply line 2 that supplies gas as a material of the gas solution; and a gas dissolving unit 20 provided on the intermediate line 17 and dissolves the gas supplied from the gas supply line 2 in the gas solution supplied from the first gas-liquid separator 8.

公开(公告)号：US20190193034A1

公开(公告)日：2019-06-27

申请号：US16225666

申请日：2018-12-19

Applicant: EBARA CORPORATION

Inventor： Yoichi NAKAGAWA ,  Suguru OZAWA ,  Toshifumi WATANABE ,  Tao XU

IPC: B01F3/04

CPC classification number: B01F3/04737 ,  B01F3/04439 ,  B01F2003/04886 ,  C02F1/78 ,  C02F2201/782 ,  C02F2209/40 ,  G02F2001/1316 ,  H01L21/67051

Abstract: A gas-dissolved liquid producing apparatus 1 includes a gas supply unit 2, a first liquid supply unit 3, a gas-dissolved liquid generator 4, a second liquid generator 20, a second liquid supply unit 21, a flow rate measuring unit 14, and a controller 23. The controller 23 controls the supply amount of the first liquid to be supplied to the gas-dissolved liquid generator 4 according to the flow rate of circulated gas-dissolved liquid measured by the flow rate measuring unit 14. The gas-dissolved liquid generator 4 dissolves gas supplied from the gas supply unit 2 in first liquid supplied from the first liquid supply unit 3 and second liquid supplied from the second liquid supply unit 21 to generate gas-dissolved liquid.