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    A HIGH-PRECISION OPTICAL SURFACE PREPARED BY SAGGING FROM A MASTERPIECE
    1.
    发明申请
    A HIGH-PRECISION OPTICAL SURFACE PREPARED BY SAGGING FROM A MASTERPIECE 审中-公开
    高精度光学表面，由精密仪器打标而成

    公开(公告)号：WO2006050891A3

    公开(公告)日：2006-08-24

    申请号：PCT/EP2005011894

    申请日：2005-11-08

    Applicant: ZEISS CARL SMT AG ,  EGLE WILHELM ,  DINGER UDO ,  MATTHES AXEL

    Inventor： EGLE WILHELM ,  DINGER UDO ,  MATTHES AXEL

    IPC: G21K1/06 ,  B24B13/00 ,  G03F7/20

    CPC classification number: G03F7/70166 ,  C03B23/0252 ,  C03B23/0357 ,  G03F7/70175 ,  G03F7/70958 ,  G21K1/06 ,  G21K2201/067

    Abstract: A method of making a high-precision optical surface which may be used either as a Wolter-type segment in an X-ray mirror system or in a collector of a EUVL system or as a spherical, aspherical, or free form normal or grazing incidence mirror in an EUVL system is prepared by sagging a thin flat glass sheet onto a masterpiece, in particular a mandrel, made from a temperature-resistant material, such as an alumina based ceramic or a keatite glass ceramic. The glass sheet is polished to the desired surface roughness (14), is posi­tioned to an upper surface of the masterpiece (16), and is heated (18) to effect sagging onto the upper surface of the masterpiece for generating a shaped body. Thereafter, the shaped body is cooled and removed from the masterpiece, is mounted within a holder (22), is inspected for deviations from the specification (24) preferably using interferometric measurements, and is corrected for defects (26), preferably using ion beam figuring.

    Abstract translation: 一种制造高精度光学表面的方法，该光学表面可以用作X射线反射镜系统中的Wolter型段或EUVL系统的集光器，或者用作球面，非球面或自由形式的法向或掠入射 EUVL系统中的反射镜是通过将薄的平板玻璃下垂到由耐热材料（例如氧化铝基陶瓷或热晶玻璃陶瓷）制成的杰作，特别是心轴上制备的。 将玻璃板抛光到所需的表面粗糙度（14），定位到杰作（16）的上表面，并被加热（18）以实现下垂到杰作的上表面以产生成形体。 之后，将成形体冷却并从杰作中取出，安装在保持器（22）内，优选使用干涉测量检查与规格（24）的偏差，并且针对缺陷（26）进行校正，优选使用离子束 搞清楚。

    OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR
    2.
    发明申请
    OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR 审中-公开
    具有改进的热行为的光学部件

    公开(公告)号：WO2005109104A2

    公开(公告)日：2005-11-17

    申请号：PCT/EP2005004861

    申请日：2005-05-04

    Applicant: EGLE WILHELM ,  ZEISS CARL LASER OPTICS GMBH ,  HAFNER WOLFGANG ,  ANDERL WILLI ,  BINGEL ULRICH ,  MUENZ HOLGER ,  NEIDHARDT THOMAS

    Inventor： EGLE WILHELM ,  HAFNER WOLFGANG ,  ANDERL WILLI ,  BINGEL ULRICH ,  MUENZ HOLGER ,  NEIDHARDT THOMAS

    IPC: G03F7/20

    CPC classification number: G03F7/70891 ,  G03F7/70175 ,  G03F7/70858

    Abstract: An optical component is suggested, comprising at least one optically effective optical element which heats up when irradi­ated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one opti­cal element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element.

    Abstract translation: 提出了一种光学部件，其包括至少一个在用光照射时加热的光学有效光学元件，以及至少一个用于至少一个光学元件的保持元件，用于将至少一个光学元件保持在载体结构中，其中 至少一个光学元件以导热方式连接到所述至少一个保持元件，并且其中所述至少一个保持元件至少部分地设置有用于从所述至少一个光学元件传递热量的主动冷却系统。

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