公开(公告)号：EP2182546A3

公开(公告)日：2011-03-30

申请号：EP09174824.4

申请日：2009-11-03

Applicant: FEI COMPANY

Inventor： Knowles, William ,  Toth, Milos

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope (100) operated with the sample (114) in a high pressure environment (116). A preferred detector (120,122) uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.

Abstract translation: 扫描透射电子显微镜（100）与样品（114）一起在高压环境（116）下操作。 优选的检测器（120,122）通过将散射或未散射的透射电子转换成二次电子来使用气体放大，以有效地进行气体放大。

公开(公告)号：EP2182546B1

公开(公告)日：2011-10-26

申请号：EP09174824.4

申请日：2009-11-03

Applicant: FEI COMPANY

Inventor： Knowles, William ,  Toth, Milos

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

公开(公告)号：EP2182546A2

公开(公告)日：2010-05-05

申请号：EP09174824.4

申请日：2009-11-03

Applicant: FEI COMPANY

Inventor： Knowles, William ,  Toth, Milos

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/2449 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope (100) operated with the sample (114) in a high pressure environment (116). A preferred detector (120,122) uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.

Abstract translation: 扫描透射电子显微镜（100），其在高压环境（116）中与样品（114）一起操作。 优选的检测器（120,122）通过将散射或未散射的透射电子转换成二次电子来进行气体放大，以有效地进行气体放大。