公开(公告)号：EP2755226B1

公开(公告)日：2016-06-29

申请号：EP13151244.4

申请日：2013-01-15

Applicant: FEI COMPANY

Inventor： Nederlof, Frank

IPC: H01J37/20

CPC classification number: H01J37/20 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/201 ,  H01J2237/26

公开(公告)号：EP2755226A1

公开(公告)日：2014-07-16

申请号：EP13151244.4

申请日：2013-01-15

Applicant: FEI COMPANY

Inventor： Nederlof, Frank

IPC: H01J37/20

CPC classification number: H01J37/20 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/201 ,  H01J2237/26

Abstract: The invention relates to a sample carrier (10) for a transmission electron microscope. When using state of the art sample carriers, such as half-moon grids in combination with detectors detecting, for example, X-ray emitted at a large emittance angle, shadowing is a problem. Similar problems occur when performing tomography, in which the sample is rotated over a large angle.
The invention provides a solution to shadowing by forming the parts (16) of the grid bordering the interface between sample and grid as tapering parts.

Abstract translation: 本发明涉及一种用于透射电子显微镜的样品载体（10）。 当使用现有技术的样品载体（例如半月板结合检测器检测例如以大的发射角发射的X射线）时，阴影是一个问题。 执行断层扫描时会发生类似的问题，其中样品在大角度旋转。 本发明通过形成与样品和栅格之间的界面接近的网格的部分（16）作为渐缩部分来提供阴影的解决方案。

公开(公告)号：EP2182545A1

公开(公告)日：2010-05-05

申请号：EP09174548.9

申请日：2009-10-30

Applicant: FEI COMPANY

Inventor： Van den Oetelaar, Johannes ,  Hermkens, Jorn ,  Dona, Pleun ,  Nederlof, Frank ,  Wondergem, Wim

IPC: H01J37/18 ,  H01J37/26

CPC classification number: H01J37/185 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/202 ,  H01J2237/204 ,  Y10S977/854

Abstract: A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.

Abstract translation: 诸如电子显微镜的带电粒子光学系统（100）具有在操作使用中具有用于容纳特定的一个（114）多个样品的空间（104）的真空室（102）。 带电粒子光学系统具有装载器（106），其具有能够进出空间的部分（108）。 该部件被构造成用于将从系统外部引出的检体托架（110）附接到第一保持器（112），或者将托架从第一保持器拆下并从系统内部移除托架。 载体容纳第一标本。 该系统在室的壁中具有接口（116），用于可拆卸地容纳第一保持器（112）或具有安装在其上的第二样本（120）的第二保持器（118）。

公开(公告)号：EP2182544A1

公开(公告)日：2010-05-05

申请号：EP08168121.5

申请日：2008-10-31

Applicant: FEI COMPANY

Inventor： Oetelaar, van den., Johannes ,  Hermkens, Jorn ,  Dona, Pleun ,  Nederlof, Frank ,  Wondergem, Wim

IPC: H01J37/18 ,  H01J37/26

CPC classification number: H01J37/185 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/202 ,  H01J2237/204 ,  Y10S977/854

Abstract: A charged-particle optical system has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The microscope has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen (114). The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.

Abstract translation: 带电粒子光学系统具有一个具有空间（104）的真空室（102），用于在操作使用中容纳多个样本中的特定的一个（114）。 显微镜具有装载器（106），其具有能够进出空间的部分（108）。 该部件被构造成用于将从系统外部引出的检体托架（110）附接到第一保持器（112），或者将托架从第一保持器拆下并从系统内部移除托架。 载体容纳第一样本（114）。 该系统在室的壁中具有接口（116），用于可拆卸地容纳第一保持器（112）或具有安装在其上的第二样本（120）的第二保持器（118）。