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Patent Agency Ranking1.发明公开Multiple Sample Attachment to Nano Manipulator for High Throughput Sample Preparation 有权多个采样附接到纳米机械手具有高通量样品制备
公开(公告)号：EP2778652A2
公开(公告)日：2014-09-17
申请号：EP14159460.6
申请日：2014-03-13
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Stone, Stacey , Senowitz, Corey
IPC: G01N1/28
CPC classification number: H01J37/3023 , G01N1/286 , H01J2237/201 , H01J2237/208 , H01J2237/31745
Abstract: An improved method for extracting and handling multiple samples for S/TEM analysis is disclosed. Preferred embodiments of the present invention make use of a micromanipulator that attaches multiple samples at one time in a stacked formation and a method of placing each of the samples onto a TEM grid. By using a method that allows for the processing of multiple samples, the throughput of sample prep in increased significantly.
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2.发明公开Detaching probe from TEM sample during sample preparation 有权Löseneiner Sonde von einer TEM-ProbewährendProbenvorbereitung
公开(公告)号：EP2837926A1
公开(公告)日：2015-02-18
申请号：EP14180857.6
申请日：2014-08-13
Applicant: FEI COMPANY
Inventor： Senowitz, Corey
IPC: G01N1/32 , H01J37/305
CPC classification number: C23C14/30 , G01N1/32 , H01J37/3056 , H01J2237/208 , H01J2237/304 , H01J2237/31745
Abstract: An improved method of preparing a TEM sample. A sample is extracted from a work piece and attached to a probe for transport to a sample holder. The sample is attached to the sample holder using charged particle beam deposition, and mechanically separated from probe by moving the probe and the sample holder relative to each other, without severing the connection using a charged particle beam.
Abstract translation: 一种制备TEM样品的改进方法。 将样品从工件中提取并附着到探针上以运送到样品架上。 使用带电粒子束沉积将样品附着到样品架上，并且通过相对于彼此移动探针和样品架而与探针机械分离，而不用带电粒子束断开连接。
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3.发明授权Multiple Sample Attachment to Nano Manipulator for High Throughput Sample Preparation 有权用于高通量样品制备的多个样品附着到纳米机器人
公开(公告)号：EP2778652B1
公开(公告)日：2017-07-12
申请号：EP14159460.6
申请日：2014-03-13
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Stone, Stacey , Senowitz, Corey
IPC: G01N1/28 , H01J37/20 , H01J37/302
CPC classification number: H01J37/3023 , G01N1/286 , H01J2237/201 , H01J2237/208 , H01J2237/31745
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公开(公告)号：EP2837926B1
公开(公告)日：2016-06-01
申请号：EP14180857.6
申请日：2014-08-13
Applicant: FEI COMPANY
Inventor： Senowitz, Corey
IPC: G01N1/32 , H01J37/305
CPC classification number: C23C14/30 , G01N1/32 , H01J37/3056 , H01J2237/208 , H01J2237/304 , H01J2237/31745
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5.发明公开Multiple Sample Attachment to Nano Manipulator for High Throughput Sample Preparation 有权Mehrfachprobennahmebefestigung an Nanomanipulator zur Probenvorbereitung mit hohem Durchsatz
公开(公告)号：EP2778652A3
公开(公告)日：2016-05-25
申请号：EP14159460.6
申请日：2014-03-13
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Stone, Stacey , Senowitz, Corey
IPC: G01N1/28 , H01J37/20 , H01J37/302
CPC classification number: H01J37/3023 , G01N1/286 , H01J2237/201 , H01J2237/208 , H01J2237/31745
Abstract: An improved method for extracting and handling multiple samples for S/TEM analysis is disclosed. Preferred embodiments of the present invention make use of a micromanipulator that attaches multiple samples at one time in a stacked formation and a method of placing each of the samples onto a TEM grid. By using a method that allows for the processing of multiple samples, the throughput of sample prep in increased significantly.
Abstract translation: 公开了一种用于提取和处理多个样品进行S / TEM分析的改进方法。 本发明的优选实施例利用将叠层结构中的多个样品同时附着的显微操纵器和将每个样品放置在TEM网格上的方法。 通过使用允许多个样品处理的方法，样品制备的生产量显着增加。
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