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公开(公告)号：EP3018693B1
公开(公告)日：2018-12-26
申请号：EP15192862.9
申请日：2015-11-04
Applicant: FEI Company
Inventor： Brogden, Valerie , Blackwood, Jeff , Schmidt, Michael , Trivedi, Dhruti , Young, Richard , Miller, Tom , Routh, Jr., Brian , Stone, Stacey , Templeton, Todd
IPC: H01J37/304 , G01N1/28
CPC classification number: H01J37/3023 , G01N1/286 , G01N2001/2873 , H01J37/28 , H01J37/285 , H01J37/3045 , H01J37/31 , H01J2237/208 , H01J2237/31745
Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.
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公开(公告)号：EP2952872A1
公开(公告)日：2015-12-09
申请号：EP14170775.2
申请日：2014-06-02
Applicant: FEI COMPANY
Inventor： Buxbaum, Alexander , Schmidt, Michael
IPC: G01N1/06 , H01L21/304 , B28D5/04 , B26D3/28
CPC classification number: G01N1/286 , B26D3/28 , B28D5/04 , G01N2001/2873
Abstract: A method and apparatus for use in surface delayering for fault isolation and defect localization of a sample work piece is provided. More particularly, a method and apparatus for mechanically peeling of one or more layers from the sample in a rapid, controlled, and accurate manner is provided. A programmable actuator includes a delayering probe tip with a cutting edge that is shaped to quickly and accurately peel away a layer of material from a sample. The cutting face of the delayering probe tip is configured so that each peeling step peels away an area of material having a linear dimension substantially equal to the linear dimension of the delayering probe tip cutting face. The surface delayering may take place inside a vacuum chamber so that the target area of the sample can be observed in-situ with FIB/SEM imaging.
Abstract translation: 提供了用于表面延迟的用于样品工件的故障隔离和缺陷定位的方法和装置。 更具体地，提供了一种用于以快速，受控和准确的方式从样品机械剥离一层或多层的方法和装置。 可编程致动器包括具有切割边缘的延迟探针尖端，其被成形为快速且准确地从样品上剥离一层材料。 延迟探针尖端的切割面被构造成使得每个剥离步骤剥离具有基本上等于延迟探针尖端切割面的线性尺寸的线性尺寸的材料的区域。 表面延迟可能发生在真空室内，从而可以用FIB / SEM成像原位观察样品的目标区域。
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公开(公告)号：EP2933820A1
公开(公告)日：2015-10-21
申请号：EP14172692.7
申请日：2014-06-17
Applicant: FEI COMPANY
Inventor： Routh, Jr., Brian , Brogden, Valerie , Schmidt, Michael
CPC classification number: H01J37/20 , G01N1/44 , H01J37/26 , H01J37/261 , H01J2237/08 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/2602 , H01J2237/31745
Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.
Abstract translation: TEM网格提供具有步骤的帖子，步骤增加可以附加到网格的样本数量。 在一些实施例中，每个柱包括单面阶梯构造。 提取多个样本的方法包括提取样本并将样本附加到帖子上的不同阶梯步骤。
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4.发明授权Multiple Sample Attachment to Nano Manipulator for High Throughput Sample Preparation 有权用于高通量样品制备的多个样品附着到纳米机器人
公开(公告)号：EP2778652B1
公开(公告)日：2017-07-12
申请号：EP14159460.6
申请日：2014-03-13
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Stone, Stacey , Senowitz, Corey
IPC: G01N1/28 , H01J37/20 , H01J37/302
CPC classification number: H01J37/3023 , G01N1/286 , H01J2237/201 , H01J2237/208 , H01J2237/31745
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公开(公告)号：EP2902845A1
公开(公告)日：2015-08-05
申请号：EP15152977.3
申请日：2015-01-29
Applicant: FEI COMPANY
Inventor： Buxbaum, Alexander , Schmidt, Michael
Abstract: A method and apparatus for use in surface delayering for fault isolation and defect localization of a sample work piece is provided. More particularly, a method and apparatus for mechanically peeling of one or more layers from the sample in a rapid, controlled, and accurate manner is provided. A programmable actuator includes a delayering probe tip with a cutting edge that is shaped to quickly and accurately peel away a layer of material from a sample. The cutting face of the delayering probe tip is configured so that each peeling step peels away an area of material having a linear dimension substantially equal to the linear dimension of the delayering probe tip cutting face. The surface delayering may take place inside a vacuum chamber so that the target area of the sample can be observed in-situ with FIB/SEM imaging.
Abstract translation: 提供了用于表面去层的方法和设备，用于样品工件的故障隔离和缺陷定位。 更具体地说，提供了用于以快速，受控和准确的方式从样品机械地剥离一层或多层的方法和设备。 一个可编程的执行器包括一个具有切割边缘的去层探针尖端，该切割边缘被成形为快速并准确地从样品上剥离一层材料。 去层探针尖端的切割面被构造成使得每个剥离步骤剥离具有基本上等于去层探针尖端切割面的线性尺寸的线性尺寸的材料区域。 表面去层可以发生在真空室内，以便可以用FIB / SEM成像就地观察样品的目标区域。
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Patent Agency Ranking6.发明公开Deposition of a protective layer by charged particle beam sputtering and processing of the layer by a charged particle beam 有权通过该层的带电粒子束和处理的方式通过溅射带电粒子束的装置的保护层的沉积
公开(公告)号：EP2209047A1
公开(公告)日：2010-07-21
申请号：EP10159048.7
申请日：2007-02-14
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Blackwood, Jeff
IPC: G03F1/00 , H01L21/3213 , H01J37/317 , C23C14/22 , B23K15/00
CPC classification number: B23K15/06 , B23K15/0086 , B23K2201/40 , C23C14/30 , H01J37/302 , H01J37/3056
Abstract: A coating is applied to a work piece (222) in a charged particle beam system (200) without directing the beam (218) to the work piece. The coating is applied by sputtering, either within the charged particle beam vacuum chamber (226) or outside the charged particle beam vacuum chamber. In one embodiment, the sputtering is performed by directing the charged particle beam (218) to a sputter material source (242), such as a needle (240) from a gas injection system. Material is sputtered from the sputter material source onto the work piece to form, for example, a protective or conductive coating, without requiring the beam to be directed to the work piece, thereby reducing or eliminating damage to the work piece.
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公开(公告)号：EP2902845B1
公开(公告)日：2020-04-15
申请号：EP15152977.3
申请日：2015-01-29
Applicant: FEI COMPANY
Inventor： Buxbaum, Alexander , Schmidt, Michael
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8.发明授权Deposition of a protective layer by charged particle beam sputtering and processing of the layer by a charged particle beam 有权通过该层的带电粒子束和处理的方式通过溅射带电粒子束的装置的保护层的沉积
公开(公告)号：EP2209047B1
公开(公告)日：2016-01-06
申请号：EP10159048.7
申请日：2007-02-14
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Blackwood, Jeff
IPC: C23C14/30 , H01J37/302 , H01J37/305 , B23K15/00 , B23K15/06
CPC classification number: B23K15/06 , B23K15/0086 , B23K2201/40 , C23C14/30 , H01J37/302 , H01J37/3056
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公开(公告)号：EP2933821A1
公开(公告)日：2015-10-21
申请号：EP15163360.9
申请日：2015-04-13
Applicant: FEI Company
Inventor： Routh, Jr., Brian , Brogden, Valerie , Schmidt, Michael
CPC classification number: H01J37/20 , G01N1/44 , H01J37/26 , H01J37/261 , H01J2237/08 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/2602 , H01J2237/31745
Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.
Abstract translation: TEM网格提供具有步骤的帖子，步骤增加可以附加到网格的样本数量。 在一些实施例中，每个柱包括单面阶梯构造。 提取多个样本的方法包括提取样本并将样本附加到帖子上的不同阶梯步骤。
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公开(公告)号：EP2749863A3
公开(公告)日：2016-05-04
申请号：EP13197357.0
申请日：2013-12-16
Applicant: FEI COMPANY
Inventor： Schmidt, Michael , Blackwood, Jeff , Stone, Stacey , Lee, Sang Hoon , Kelley, Ronald
IPC: H01L21/205
CPC classification number: G01N1/32 , G01N1/28 , H01L21/30655
Abstract: A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.
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