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公开(公告)号：EP1299210A4
公开(公告)日：2004-11-17
申请号：EP01952272
申请日：2001-06-27
Applicant: IBM , FREUDENBERG NON WOVENS
Inventor： CHEN SHYNG-TSONG , CHUNG ALEX SIU KEUNG , DAVIS KENNETH M , HSU OSCAR KAI CHI , RODBELL KENNETH P
CPC classification number: B24B37/26 , Y10T409/303808 , Y10T409/306608 , Y10T409/308624
Abstract: Grooves (70, 76, 78, & 80-82) are formed in a CMP pad (12) by positioning the pad (12) on a supporting surface (10) with a working surface (22) of the pad (12) in spaced relation opposite to a router bit (24) and at least one projecting stop member (33) adjacent to the router bit (24), an outer end portion of the bit (24) projecting beyond the stop (33). When the bit (24) is rotated, relative axial movement between the bit (24) and the pad (12) causes the outer end portion of the bit (24) to cut an initial recess in the pad (12). Relative lateral movement between the rotating bit (24) and the pad (12) then forms a groove (70) which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove (70) are limited by applying a vacuum to the working surface (22) of the pad (12) to keep it in contact with the stop member(s) (33). Different lateral movements between the bit (24) and the pad (12) are used to form a variety of groove patterns (76, 78, & 80-82), the depths of which are precisely controlled by the stop member(s) (33).
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公开(公告)号：CA2413803A1
公开(公告)日：2002-01-10
申请号：CA2413803
申请日：2001-06-27
Applicant: FREUDENBERG NON WOVENS , IBM
Inventor： DAVIS KENNETH M , HSU OSCAR KAI CHI , CHUNG ALEX SIU KEUNG , CHEN SHYNG-TSONG , RODBELL KENNETH P
IPC: B24B37/26 , B24D13/14 , H01L21/304 , B24B1/00
Abstract: Grooves (70, 76, 78, & 80-82) are formed in a CMP pad (12) by positionin g the pad (12) on a supporting surface (10) with a working surface (22) of the pad (12) in spaced relation opposite to a router bit (24) and at least one projecting stop member (33) adjacent to the router bit (24), an outer end portion of the bit (24) projecting beyond the stop (33). When the bit (24) i s rotated, relative axial movement between the bit (24) and the pad (12) cause s the outer end portion of the bit (24) to cut an initial recess in the pad (12). Relative lateral movement between the rotating bit (24) and the pad (1 2) then forms a groove (70) which extends laterally away from the recess and ha s a depth substantially the same as that of the recess. The depths of the initial recess and the groove (70) are limited by applying a vacuum to the working surface (22) of the pad (12) to keep it in contact with the stop member(s) (33). Different lateral movements between the bit (24) and the pad (12) are used to form a variety of groove patterns (76, 78, & 80-82), th e depths of which are precisely controlled by the stop member(s) (33).
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公开(公告)号：AU7304501A
公开(公告)日：2002-01-14
申请号：AU7304501
申请日：2001-06-27
Applicant: IBM , FREUDENBERG NON WOVENS
Inventor： CHEN SHYNG-TSONG , CHUNG ALEX SIU KEUNG , DAVIS KENNETH M , HSU OSCAR KAI CHI , RODBELL KENNETH P
IPC: B24B37/26 , B24D13/14 , H01L21/304 , B24B1/00
Abstract: Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).
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4.发明专利
公开(公告)号：JP2004200684A
公开(公告)日：2004-07-15
申请号：JP2003413888
申请日：2003-12-11
Applicant: Internatl Business Mach Corp
, インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation Inventor： CHEN SHYNG-TSONG , DALTON TIMOTHY J , DAVIS KENNETH M , HU CHAO-KUN , JAMIN FEN F , KALDOR STEFFEN K , KRISHNAN MAHADEVAIYER , KUMAR KAUSHIK , MICHAEL F ROFARO , SANDRA G MARUHOTORA
IPC: H01L21/768 , H01L23/532
CPC classification number: H01L21/76849 , H01L21/76834 , H01L21/76847 , H01L21/76883 , H01L23/53238 , H01L2924/0002 , H01L2924/00
Abstract: PROBLEM TO BE SOLVED: To provide the structure of an integrated circuit having a logic/functional device layer and an interconnection layer above it. SOLUTION: This interconnection layer has a substrate, a conductive feature 122 in the substrate, and a cap 151 which is formed only above the conductive feature. COPYRIGHT: (C)2004,JPO&NCIPI
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Patent Agency Ranking
公开(公告)号：WO0202279A2
公开(公告)日：2002-01-10
申请号：PCT/US0120904
申请日：2001-06-29
Applicant: IBM , CHEN SHYNG TSONG , DAVIS KENNETH M , RODBELL KENNETH P
Inventor： CHEN SHYNG-TSONG , DAVIS KENNETH M , RODBELL KENNETH P
Abstract: Grooves are formed in a CMP (12) pad by positioning the pad on a supporting surface with a working surface (22) of the pad in spaced relation opposite to a router bit (24) and at least one projecting stop member (33) adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves. Grooves in the polishing surface may be provided with outlets through which a polishing slurry may flow while the polishing surface is in contact with a workpiece surface.
Abstract translation: 通过将衬垫定位在支撑表面上，通过衬垫的工作表面（22）以与router刨机钻头（24）和至少一个相邻的突出的止动构件（33）相对的间隔关系相反的方式在CMP（12） 到router刨机钻头，钻头的外端部分突出到挡块之外。 当钻头旋转时，钻头和垫之间的相对轴向移动导致钻头的外端部分切割垫中的初始凹陷。 旋转钻头和垫之间的相对横向运动然后形成凹槽，该凹槽横向地远离凹槽延伸并且具有与凹槽基本相同的深度。 钻头和垫之间的不同横向运动用于形成各种凹槽图案，其深度由止挡构件精确控制。 凹槽可以形成在抛光表面和/或抛光垫的后部相对表面中，并且通道可以设置用于将后部凹槽与抛光表面或前部凹槽互连。 抛光表面中的凹槽可以设置有出口，在抛光表面与工件表面接触的同时抛光浆料可以流过出口。
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公开(公告)号：AU7170901A
公开(公告)日：2002-01-14
申请号：AU7170901
申请日：2001-06-29
Applicant: IBM
Inventor： CHEN SHYNG-TSONG , DAVIS KENNETH M , RODBELL KENNETH P
Abstract: Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.
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7.发明专利
公开(公告)号：CA2441419A1
公开(公告)日：2002-12-19
申请号：CA2441419
申请日：2001-11-20
Applicant: IBM , FREUDENBERG NONWOVENS L P
Inventor： DAVIS KENNETH M , BILLINGS SCOTT CLAYTON , GILBRIDE DAVID S , VANGSNESS JEAN , RODBELL KENNETH P , CHEN SHYNG-TSONG , HSU OSCAR KAI CHI
Abstract: A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, a nd the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers ar e embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
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公开(公告)号：AT307006T
公开(公告)日：2005-11-15
申请号：AT01952272
申请日：2001-06-27
Applicant: IBM
Inventor： CHEN SHYNG-TSONG , CHUNG ALEX SIU KEUNG , DAVIS KENNETH M , HSU OSCAR KAI CHI , RODBELL KENNETH P
Abstract: Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).
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公开(公告)号：AT289895T
公开(公告)日：2005-03-15
申请号：AT01950744
申请日：2001-06-29
Applicant: IBM
Inventor： CHEN SHYNG-TSONG , DAVIS KENNETH M , RODBELL KENNETH P
Abstract: Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.
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