公开(公告)号：EP3065161A4

公开(公告)日：2017-08-02

申请号：EP15778595

申请日：2015-01-09

Applicant: FUTURE ADDITIVE MFG TECH RES ASS

Inventor： SATO TAKASHI

IPC: H01J37/06 ,  B29C67/00 ,  H01J1/13 ,  H01J37/04

CPC classification number: H01J37/065 ,  B22F3/1055 ,  B22F2003/1056 ,  B22F2003/1057 ,  B22F2999/00 ,  B33Y30/00 ,  H01J3/08 ,  H01J3/12 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/06308 ,  H01J2237/0653 ,  B22F2203/03 ,  B22F2202/06 ,  B22F2202/11

Abstract: When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.

Abstract translation: 当发射电流改变时，防止电子束的亮度降低。 电子枪包括发射热电子的阴极，聚焦热电子的Wehnelt电极，从所述阴极的远端提取热电子的控制电极，加速热电子并用热电子作为电子束照射粉末的阳极 以及最佳条件收集控制器，其改变要施加到韦纳特电极的偏置电压和要施加到控制电极的控制电极电压中的至少一个，并且将偏置电压和控制电极电压的组合确定为 其中电子束的亮度达到峰值。