公开(公告)号：CA2645834A1

公开(公告)日：2009-06-20

申请号：CA2645834

申请日：2008-12-04

Applicant: GEN ELECTRIC

Inventor： WANG XUEFENG ,  THAKRE PARAG ,  BOOMHOVER OLIVER CHARLES ,  SUBRAMANIAN KANAKASABAPATHI ,  KISHORE KUNA VENKAT SATYA RAMA ,  AIMI MARCO FRANCESCO ,  CLAYDON GLENN SCOTT ,  KEIMEL CHRISTOPHER FRED

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04

Abstract: A MEMS switch (30, 50, 60, 70, 80) includes a substrate (32), a movable actuator (53, 63, 83) coupled to the substrate (32), a substrate contact (35 , 85), a substrate electrode (36, 56, 86), and a conductive stopper (39, 59, 69, 79) electrically coupled to the movable actuator (33, 63, 83) and structured to prevent the movable actuator (33, 63, 83) from contacting the substrate electrode (36, 56, 86) while allowing the movable actuator (33, 63, 83) to make contact with the substrat e contact (35, 85).