公开(公告)号：US12113070B2

公开(公告)日：2024-10-08

申请号：US17830830

申请日：2022-06-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Peter Baars ,  Viorel Ontalus ,  Ketankumar H. Tailor ,  Michael Zier ,  Crystal R. Kenney ,  Judson Holt

IPC: H01L27/12 ,  H01L21/84 ,  H01L29/66

CPC classification number: H01L27/1207 ,  H01L21/84 ,  H01L29/66242

Abstract: Structures including a vertical heterojunction bipolar transistor and methods of forming a structure including a vertical heterojunction bipolar transistor. The structure comprises a semiconductor substrate including a trench, a first semiconductor layer including a portion adjacent to the trench, a dielectric layer between the first semiconductor layer and the semiconductor substrate, and a second semiconductor layer in the trench. The dielectric layer has an interface with the first semiconductor layer, and the second semiconductor layer includes a portion that is recessed relative to the interface. The structure further comprises a vertical heterojunction bipolar transistor including a collector in the portion of the second semiconductor layer.

公开(公告)号：US20230395607A1

公开(公告)日：2023-12-07

申请号：US17830830

申请日：2022-06-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Peter Baars ,  Viorel Ontalus ,  Ketankumar H. Tailor ,  Michael Zier ,  Crystal R. Kenney ,  Judson Holt

IPC: H01L27/12 ,  H01L21/84 ,  H01L29/66

CPC classification number: H01L27/1207 ,  H01L21/84 ,  H01L29/66242

Abstract: Structures including a vertical heterojunction bipolar transistor and methods of forming a structure including a vertical heterojunction bipolar transistor. The structure comprises a semiconductor substrate including a trench, a first semiconductor layer including a portion adjacent to the trench, a dielectric layer between the first semiconductor layer and the semiconductor substrate, and a second semiconductor layer in the trench. The dielectric layer has an interface with the first semiconductor layer, and the second semiconductor layer includes a portion that is recessed relative to the interface. The structure further comprises a vertical heterojunction bipolar transistor including a collector in the portion of the second semiconductor layer.

公开(公告)号：US20250169087A1

公开(公告)日：2025-05-22

申请号：US18512859

申请日：2023-11-17

Applicant: GlobalFoundries U.S. Inc.

Inventor： Judson R. Holt ,  Crystal R. Kenney ,  Vibhor Jain ,  John J. Pekarik ,  Mona Nafari ,  Jeffrey B. Johnson

IPC: H01L29/737 ,  H01L29/06 ,  H01L29/08 ,  H01L29/165 ,  H01L29/66

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertical heterojunction bipolar transistors and methods of manufacture. The structure includes: a sub-collector region; a collector region above the sub-collector region; an intrinsic base above the collector region; an emitter above the intrinsic base region; and an extrinsic base on the intrinsic base and adjacent to the emitter, wherein the collector region includes an undercut profile comprising lower inwardly tapered sidewalls and upper inwardly tapered sidewalls which extend to a narrow section between the sub-collector region and the base region.

公开(公告)号：US20240072180A1

公开(公告)日：2024-02-29

申请号：US17896711

申请日：2022-08-26

Applicant: GlobalFoundries U.S. Inc.

Inventor： Saloni Chaurasia ,  Jeffrey Johnson ,  Vibhor Jain ,  Crystal R. Kenney ,  Sudesh Saroop ,  Teng-Yin Lin ,  John J. Pekarik

IPC: H01L29/93 ,  H01L29/10 ,  H01L29/66

CPC classification number: H01L29/93 ,  H01L29/1095 ,  H01L29/66174

Abstract: Structures for a varactor diode and methods of forming same. The structure comprises a first semiconductor layer including a section on a substrate, a second semiconductor layer on the section of the first semiconductor layer, a third semiconductor layer on the second semiconductor layer, and a doped region in the section of the first semiconductor layer. The section of the first semiconductor layer and the doped region have a first conductivity type, and the second semiconductor layer comprises silicon-germanium having a second conductivity type opposite to the first conductivity type, and the third semiconductor layer has the second conductivity type. The doped region contains a higher concentration of a dopant of the first conductivity type than the section of the first semiconductor layer. The second semiconductor layer abuts the first section of the first semiconductor layer along an interface, and the doped region is positioned adjacent to the interface.