公开(公告)号：EP1684109A4

公开(公告)日：2007-06-13

申请号：EP05737135

申请日：2005-04-27

Applicant: OLYMPUS CORP ,  HAMAMATSU PHOTONICS KK

Inventor： EDA YUKIO ,  ADACHI SADASHI ,  KURITA NORIO ,  OSAJIMA TETSUYA

IPC: G02B27/00 ,  B23K26/04 ,  B23K26/06 ,  H01L21/301

CPC classification number: B23K26/046 ,  B23K26/0057 ,  B23K26/032 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/40 ,  B23K2201/40 ,  B23K2203/50

Abstract: A laser condensing optical system of the present invention includes a laser beam source which emits a laser beam, a condensing optical system which is arranged between the laser beam source and a medium and condenses the laser beam in the medium, and a laser divergence point moving unit which can move the position of a laser divergence point of the laser beam along an optical axis of the laser beam in accordance with the refractive index of the medium in which the laser beam is desired to be condensed and the distance from a surface of the medium to a position where the beam is desired to be condensed.

公开(公告)号：JP2005316071A

公开(公告)日：2005-11-10

申请号：JP2004132997

申请日：2004-04-28

Applicant: Hamamatsu Photonics Kk ,  Olympus Corp ,  オリンパス株式会社 ,  浜松ホトニクス株式会社

Inventor： ADACHI SADASHI ,  KURITA NORIO ,  OSAJIMA TETSUYA

IPC: G02B7/28 ,  B23K26/04 ,  B23K26/06 ,  B23K101/40 ,  G02B13/00

Abstract: PROBLEM TO BE SOLVED: To easily correct spherical aberration without causing trouble with a simple constitution. SOLUTION: The laser machining device 1 is equipped with a laser beam source for emitting a laser beam L, a beam collimating means for collimating the flux of the laser beam L emitted from the laser beam source to parallel beams, a condensing optical system 3 condensing the laser beam L in a parallel beams state to the medium, a 1st lens group 4 arranged to move along in the optical axis direction of the parallel beams in the parallel beams between the beam collimating means and the condensing optical system 3 and constituted of one or more lenses, a 2nd lens group 5 arranged in a fixed state in the parallel beams between the 1st lens group 4 and the condensing optical system 3 and constituted of one or more lenses, and a moving means 6 for moving the 1st lens group 4 in accordance with the refractive index of the medium to which the laser beam L is to be condensed and a distance from the surface of the medium to the position to which the laser beam L is to be condensed. In the laser machining device 1, the 2nd lens group 5 is arranged so that its focal position on a back side may exist at least near the position of the entrance pupil of the condensing optical system 3. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了容易地校正球面像差而不会产生简单结构的麻烦。

解决方案：激光加工装置1配备有用于发射激光束L的激光束源，用于使从激光束源发射的激光束L的光束对准平行光束的光束准直装置，聚光光学 系统3将激光束L以平行光束状态聚光到介质上;第一透镜组4，被布置成沿着光束准直装置和聚光光学系统3之间的平行光束中的平行光束的光轴方向移动;以及 由一个或多个透镜构成的第二透镜组5，在第一透镜组4和聚光光学系统3之间的平行光束中以固定状态布置并由一个或多个透镜构成的第二透镜组5和用于移动第一透镜组的移动装置6 透镜组4根据激光束L将被冷凝的介质的折射率和从介质表面到激光束L将被冷凝的位置的距离。 在激光加工装置1中，第二透镜组5布置成使得其后侧的焦点位置可以至少存在于聚光光学系统3的入射光瞳的位置附近。（C）2006 ，JPO＆NCIPI

公开(公告)号：JP2005316069A

公开(公告)日：2005-11-10

申请号：JP2004132995

申请日：2004-04-28

Applicant: Hamamatsu Photonics Kk ,  Olympus Corp ,  オリンパス株式会社 ,  浜松ホトニクス株式会社

Inventor： ADACHI SADASHI ,  EDA YUKIO ,  KURITA NORIO ,  OSAJIMA TETSUYA

IPC: G02B27/00 ,  B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  B23K101/40 ,  H01L21/301

Abstract: PROBLEM TO BE SOLVED: To easily correct spherical aberration without causing trouble with a simple constitution. SOLUTION: The laser condensing optical system 1 is equipped with a laser beam source for emitting a laser beam L to the surface of a medium A, a condensing optical system 2 arranged between the laser beam source and the medium A and condensing the laser beam L to the medium, and a laser diverging point moving means 4 capable of moving the position of the laser diverging point 3 of the laser beam L along on the optical axis of the laser beam L in accordance with the refractive index of the medium A to which the laser beam L is to be condensed and a distance from the surface of the medium A to the position to which the laser beam L is to be condensed. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了容易地校正球面像差而不会产生简单结构的麻烦。 解决方案：激光聚光光学系统1配备有用于将激光束L发射到介质A的表面的激光束源，设置在激光束源和介质A之间的聚光光学系统2， 激光束L到介质上，以及激光发散点移动装置4，其能够根据介质的折射率沿激光束L的光轴移动激光束L的激光发散点3的位置 激光束L将被冷凝的距离A和从介质A的表面到激光束L将被冷凝的位置的距离。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：MY139787A

公开(公告)日：2009-10-30

申请号：MYPI20050127

申请日：2005-01-12

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA

IPC: B23K26/03

Abstract: TO PROVIDE A LASER PROCESSING APPARATUS (1) WHICH CAN CONVERGE A LASER BEAM (L1) FOR PROCESSING AN OBJECT TO BE PROCESSED (S) AT A POSITION AS CLOSE AS POSSIBLE TO A PREDETERMINED POSITION. THIS LASER PROCESSING APPARATUS (1) IS ONE FOR IRRADIATING AN OBJECT TO BE PROCESSED (S) WITH A PROCESSING LASER BEAM (L1) WHILE POSITIONING A CONVERGING POINT (P) WITHIN THE OBJECT (S) SO AS TO FORM A MODIFIED REGION (R) CAUSED BY MULTIPHOTON ABSORPTION WITHIN THE OBJECT (S) ALONG A LINE ALONG WHICH THE OBJECT (S) SHOULD BE CUT IN THE OBJECT (S), AND COMPRISES AN OBJECTIVE LENS UNIT (5) INCLUDING A PROCESSING OBJECTIVE LENS (42) WHICH CONVERGES THE PROCESSING LASER BEAM (L1) AND A RANGE FINDING LASER BEAM (L2) FOR MEASURING A DISPLACEMENT OF A MAIN SURFACE (S1) OF THE OBJECT (S) ON AN IDENTICAL AXIS (), A LIGHT-RECEIVING PART (45) WHICH RECEIVES A REFLECTED LIGHT BEAM OF THE RANGE FINDING LASER BEAM (L2) ON THE MAIN SURFACE (S1), AND AN ACTUATOR (43) WHICH HOLDS THE PROCESSING OBJECTIVE LENS (42) ACCORDING TO THE RECEIVED REFLECTED LIGHT BEAM SUCH THAT THE LENS (42) IS CAPABLE OF FREELY ADVANCING AND RETRACTING WITH RESPECT TO THE MAIN SURFACE (S1); AND A HOUSING (21) TO WHICH A LASER UNIT (3) FOR EMITTING THE PROCESSING LASER BEAM (L1) IS ATTACHED. THE OBJECTIVE LENS UNIT (5) IS DETACHABLY ATTACHED TO THE HOUSING (21).

公开(公告)号：ES2381254T3

公开(公告)日：2012-05-24

申请号：ES03777262

申请日：2003-12-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： FUKUYO FUMITSUGU ,  FUKUMITSU KENSHI ,  OSAJIMA TETSUYA

IPC: B23K26/046 ,  B23K26/064 ,  B23K26/066 ,  B23K26/40 ,  B23K101/40 ,  B28D1/22 ,  B28D5/00 ,  H01S3/00

Abstract: Aparato de procesamiento con láser (20) para irradiar un objeto a procesar en forma de oblea (1) con luz láser (L1) mientras se sitúa un punto de convergencia de la luz (P) en el interior del objeto para así formar una zona modificada (7), comprendiendo el aparato: un expansor de haz (34) para aumentar el tamaño de haz de la luz láser emitida desde una fuente de luz láser (22); una lente condensadora (31) para converger la luz láser que incide sobre la misma por medio del expansor de haz hacia el objeto; y caracterizado por: un elemento de sujeción de la lente (29) que sujeta la lente condensadora (31) y que incluye un primer orificio de transmisión de luz (32) para hacer que la luz láser incida sobre la lente condensadora; en el cual un elemento de diafragma (38), que tiene un segundo orificio de transmisión de luz (39) para reducir y transmitir la luz láser, se dispone en una trayectoria óptica de la luz láser (L1) que conecta el expansor de haz (34) y el primer orificio de transmisión de luz (32) entre sí y está dispuesto para quedar separado del elemento de sujeción de la lente (29), de manera que se evita que el calor se transmita del elemento de diafragma (38) al elemento de sujeción de la lente (29), en el que la luz láser (L1) emitida desde el expansor de haz (34) es luz paralela, el segundo orificio de transmisión de luz (39) tiene un diámetro no mayor que el del primer orificio de transmisión de luz (32), y en el que el primer orificio de transmisión de luz (32) actúa de pupila de entrada de la luz láser (L1) a la lente condensadora (31) y la zona modificada (7) se forma por absorción multifotónica en el interior del objeto que se produce bajo un estado en el que la densidad de potencia máxima de la luz láser es de 1 x 108 W/cm2 o mayor.

公开(公告)号：AU2003289188A1

公开(公告)日：2004-06-23

申请号：AU2003289188

申请日：2003-12-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： FUKUYO FUMITSUGU ,  FUKUMITSU KENSHI ,  OSAJIMA TETSUYA

IPC: B23K26/046 ,  B23K26/064 ,  B23K26/066 ,  B23K101/40 ,  B28D1/22 ,  B28D5/00 ,  H01S3/00 ,  B23K26/04

Abstract: A laser processing apparatus which can suppress the positional fluctuation in light-converging point of laser light during laser processing is provided. On an optical path of laser light L1 connecting a beam expander 34 and a first light-transmitting hole 32 of a lens holder 29 to each other in a laser processing apparatus 20, a stop member 38 including a second light-transmitting hole 39 having the same diameter as that of the first light-transmitting hole 32 is disposed. Hence, the amount of laser light L1 cut by the surrounding part of the first light-transmitting hole 32 can substantially be eliminated, whereby the lens holder 29 can be prevented from being heated upon irradiation with the laser light L1. Also, even when the stop member 38 is heated by the laser light L1 cut by the surrounding part of the second light-transmitting hole 39, heat is prevented from being transmitted from the stop member 38 to the lens holder 29, since the stop member 38 is separated from the lens holder 29. Therefore, the positional fluctuation in light-converging point P1 of the laser light L1 during laser processing can be suppressed to a low level.

公开(公告)号：AU2003281709A1

公开(公告)日：2004-02-16

申请号：AU2003281709

申请日：2003-07-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KAWAI KAZUHITO ,  OSAJIMA TETSUYA

IPC: G02B6/04 ,  G02B6/10 ,  G02B6/42 ,  G03F7/20 ,  H01L21/027 ,  G03F7/16 ,  B05C11/08

Abstract: A light emitting end face side front end part of an optical fiber bundle 16 is covered by a sleeve member 13 and an emitting part outer cover 14. A glass rod holding member 42, which holds a glass rod 40, is mounted to emitting part outer cover 14. Glass rod 40 is fixed to glass rod holding member 42 by means of positioning pins 44 and a light incidence end face 40i thereof opposes a light emitting end face 16o of optical fiber bundle 16. A light emitting end face 40o of glass rod 40 has a rectangular shape. The light emitting from light emitting end face 40o is made uniform in illuminance across the entirety of its cross section and the cross section thereof is shaped to a rectangular shape in the process of being propagated while being totally reflected at the boundary surface of glass rod 40.

公开(公告)号：AT550129T

公开(公告)日：2012-04-15

申请号：AT03777262

申请日：2003-12-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： FUKUYO FUMITSUGU ,  FUKUMITSU KENSHI ,  OSAJIMA TETSUYA

IPC: B23K26/046 ,  B23K26/064 ,  B23K26/066 ,  B23K26/40 ,  B23K101/40 ,  B28D1/22 ,  B28D5/00 ,  H01S3/00

Abstract: A laser processing apparatus which can suppress the positional fluctuation in light-converging point of laser light during laser processing is provided. On an optical path of laser light L1 connecting a beam expander 34 and a first light-transmitting hole 32 of a lens holder 29 to each other in a laser processing apparatus 20, a stop member 38 including a second light-transmitting hole 39 having the same diameter as that of the first light-transmitting hole 32 is disposed. Hence, the amount of laser light L1 cut by the surrounding part of the first light-transmitting hole 32 can substantially be eliminated, whereby the lens holder 29 can be prevented from being heated upon irradiation with the laser light L1. Also, even when the stop member 38 is heated by the laser light L1 cut by the surrounding part of the second light-transmitting hole 39, heat is prevented from being transmitted from the stop member 38 to the lens holder 29, since the stop member 38 is separated from the lens holder 29. Therefore, the positional fluctuation in light-converging point P1 of the laser light L1 during laser processing can be suppressed to a low level.

公开(公告)号：MY131928A

公开(公告)日：2007-09-28

申请号：MYPI20044617

申请日：2004-11-04

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA ,  SUZUKI TATSUYA ,  WAKUDA TOSHIMITSU ,  KUSU MASAYOSHI

IPC: G02B26/02 ,  G02B5/00

Abstract: A SHUTTER UNIT CAPABLE OF PREVENTING THE SCATTERING OF THE LASER BEAM UPON CLOSING THE OPTICAL PATH OF THE LASER BEAM AND CAPABLE OF BEING MINIATURIZED, AND A LASER PROCESSING DEVICE EMPLOYING SUCH ASHUTTER UNIT. IN A SHUTTER UNIT 1, WHEN THE OPTICAL PATH OF THE LASER BEAM L IS OPENED, A ROTATING MEMBER 57 IS ROTATED AROUND AN AXIS LINE ( ), AND AN OPENING 61 IS POSITIONED ON AN OPTICAL AXIS (ALPHA) SO AS TO PASS THE LASER BEAM L THERETHROUGH. MEANWHILE, WHEN THE OPTICAL PATH OF THE LASER BEAM L IS CLOSED, THE ROTATING MEMBER 57 IS ROTATED AND A REFLECTIVE SURFACE 62 IS POSITIONED ON THE OPTICAL AXIS (ALPHA) SO AS TO REFLECT THE LASER BEAM L. HERE, SINCE THE REFLECTED LASER BEAM L IS ABSORBED BY AN OPTICAL ABSORPTION MEMBER 63, IT IS POSSIBLE TO PREVENT THE SCATTERING OF THE LASER BEAM L WHEN THE OPTICAL PATH OF THE LASER BEAM L IS CLOSED. IN ADDITION, SINCE THE OPENING 61 AND REFLECTIVE SURFACE 62 ARE BOTH FORMED ON THE ROTATING MEMBER 57 WHICH ROTATES AROUND THE AXIS LINE ( ) THAT IS SUBSTANTIALLY ORTHOGONAL TO THE OPTICAL AXIS (ALPHA), IT IS POSSIBLE TO REDUCE THE SIZE OF THE SHUTTER UNIT 1.(FIG 3)

公开(公告)号：AT522313T

公开(公告)日：2011-09-15

申请号：AT04806951

申请日：2004-12-13

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA

IPC: B23K26/03

Abstract: To provide a laser processing apparatus which can converge a laser beam for processing an object to be processed at a position as close as possible to a predetermined position. This laser processing apparatus is one for irradiating an object to be processed with a processing laser beam while positioning a converging point within the object so as to form a modified region caused by multiphoton absorption within the object along a line along which the object should be cut in the object, and comprises an objective lens unit 5 including a processing objective lens 42 which converges the processing laser beam and a rangefinding laser beam for measuring a displacement of a main surface of the object on an identical axis, a light-receiving part 45 which receives a reflected light beam of the rangefinding laser beam on the main surface, and an actuator 43 which holds the processing objective lens 42 according to the received reflected light beam such that the lens 42 is capable of freely advancing and retracting with respect to the main surface; and a housing 21 to which a laser unit for emitting the processing laser beam is attached. The objective lens unit 5 is detachably attached to the housing 21.