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1.
公开(公告)号:GB2547121A
公开(公告)日:2017-08-09
申请号:GB201704200
申请日:2016-02-08
Applicant: IBM
Inventor: JOY CHENG , MELIA TJIO , GURPREET SINGH , ALEXANDER FRIZ , HSINYU TSAI , MARKUS BRINK , MICHAEL GUILLORN , CHI-CHUN LIU , GREGORY DOERK , DANIEL PAUL SANDERS
IPC: C08J7/04 , H01L21/02 , H01L21/311 , H01L29/06 , H05K3/00
Abstract: Hybrid pre-patterns were prepared for directed self-assembly of a given block copolymer capable of forming a lamellar domain pattern. The hybrid pre-patterns have top surfaces comprising independent elevated surfaces interspersed with adjacent recessed surfaces. The elevated surfaces are neutral wetting to the domains formed by self-assembly. Material below the elevated surfaces has greater etch-resistance than material below the recessed surfaces in a given etch process. Following other dimensional constraints of the hybrid pre-pattern described herein, a layer of the given block copolymer was formed on the hybrid pre-pattern. Self- assembly of the layer produced a lamellar domain pattern comprising self-aligned, unidirectional, perpendicularly oriented lamellae over the elevated surfaces, and parallel and/or perpendicularly oriented lamellae over recessed surfaces. The domain patterns displayed long range order along the major axis of the pre-pattern. The lamellar domain patterns are useful in forming transfer patterns comprising two-dimensional customized features.
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2.
公开(公告)号:GB2547121B
公开(公告)日:2019-09-18
申请号:GB201704200
申请日:2016-02-08
Applicant: IBM
Inventor: JOY CHENG , MELIA TJIO , GURPREET SINGH , ALEXANDER FRIZ , HSINYU TSAI , MARKUS BRINK , MICHAEL GUILLORN , CHI-CHUN LIU , GREGORY DOERK , DANIEL PAUL SANDERS
IPC: C08J7/04 , B05D1/18 , G03F7/00 , H01L21/02 , H01L21/033 , H01L21/311 , H01L29/06 , H05K3/00
Abstract: Hybrid pre-patterns were prepared for directed self-assembly of a given block copolymer capable of forming a lamellar domain pattern. The hybrid pre-patterns have top surfaces comprising independent elevated surfaces interspersed with adjacent recessed surfaces. The elevated surfaces are neutral wetting to the domains formed by self-assembly. Material below the elevated surfaces has greater etch-resistance than material below the recessed surfaces in a given etch process. Following other dimensional constraints of the hybrid pre-pattern described herein, a layer of the given block copolymer was formed on the hybrid pre-pattern. Self-assembly of the layer produced a lamellar domain pattern comprising self-aligned, unidirectional, perpendicularly oriented lamellae over the elevated surfaces, and parallel and/or perpendicularly oriented lamellae over recessed surfaces. The domain patterns displayed long range order along the major axis of the pre-pattern. The lamellar domain patterns are useful in forming transfer patterns comprising two-dimensional customized features.
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