公开(公告)号：DE3750684D1

公开(公告)日：1994-12-01

申请号：DE3750684

申请日：1987-03-10

Applicant: IBM

Inventor： ANDERSON HERBERT ,  DIVAKARUNI RENUKA SHASTRI ,  DYNYS JOSEPH MICHAEL ,  KANDETZKE STEVEN MICHAEL ,  KIRBY DANIEL PATRICK ,  MASTER RAJ NAVINCHANDRA ,  CASEY JON ALFRED

IPC: H05K3/46 ,  H01L21/48 ,  H05K1/03 ,  H05K1/09 ,  H05K3/28

Abstract: The present invention provides a method for producing multilayered ceramic structures having copper-based conductors therein, wherein the onset of sintering of the copper-based conductor can be adjusted to approach or match that of the ceramic portion of the structure. In addition, methods are provided whereby the polymeric binder resin used in formation of the ceramic portion of the structure can be removed or burned-off, using oxygen-containing ambients, wherein the oxygen content is greater than 200 ppm, without oxidation of the copper-based conductors therein.

公开(公告)号：DE3750684T2

公开(公告)日：1995-05-18

申请号：DE3750684

申请日：1987-03-10

Applicant: IBM

Inventor： ANDERSON HERBERT ,  DIVAKARUNI RENUKA SHASTRI ,  DYNYS JOSEPH MICHAEL ,  KANDETZKE STEVEN MICHAEL ,  KIRBY DANIEL PATRICK ,  MASTER RAJ NAVINCHANDRA ,  CASEY JON ALFRED

IPC: H05K3/46 ,  H01L21/48 ,  H05K1/03 ,  H05K1/09 ,  H05K3/28

Abstract: The present invention provides a method for producing multilayered ceramic structures having copper-based conductors therein, wherein the onset of sintering of the copper-based conductor can be adjusted to approach or match that of the ceramic portion of the structure. In addition, methods are provided whereby the polymeric binder resin used in formation of the ceramic portion of the structure can be removed or burned-off, using oxygen-containing ambients, wherein the oxygen content is greater than 200 ppm, without oxidation of the copper-based conductors therein.