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公开(公告)号：DE3173738D1
公开(公告)日：1986-03-20
申请号：DE3173738
申请日：1981-10-29
Applicant: IBM
Inventor： BENJAMIN CHARLES EPHRAIM , CRAWFORD DAVID JAMES , DAVIS DONALD EUGENE , MOORE RICHARD DAVID , RYAN PHILIP MEADE , WEBER EDWARD VICTOR
IPC: G03F1/00 , H01J37/304 , G03B41/00
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