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公开(公告)号：BR9302987A
公开(公告)日：1994-03-01
申请号：BR9302987
申请日：1993-07-26
Applicant: IBM
Inventor： BANTU NAGESHWER R , BHATT ANIKUMAR C , KEESLER ROSS W , PAPATHOMAS KONSTANTINOS , WAGNER JEROME J
IPC: B01D3/00 , C07D317/36 , G03F7/30 , G03F7/42 , H01L21/02 , H01L21/027 , H01L21/30 , C07C69/96
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