公开(公告)号：AT512465T

公开(公告)日：2011-06-15

申请号：AT04810633

申请日：2004-11-09

Applicant: IBM

Inventor： DORIS BRUCE ,  BELYANSKY MICHAEL ,  BOYD DIANE ,  CHIDAMBARRAO DURESETI ,  GLUSCHENKOV OLEG

IPC: H01L29/49 ,  H01L21/28 ,  H01L21/324 ,  H01L21/336 ,  H01L21/8238

Abstract: A method of fabricating a semiconductor device structure, includes: providing a substrate, providing an electrode on the substrate, forming a recess in the electrode, the recess having an opening, disposing a small grain semiconductor material within the recess, covering the opening to contain the small grain semiconductor material, within the recess, and then annealing the resultant structure.