-
公开(公告)号:DE2758147A1
公开(公告)日:1978-07-13
申请号:DE2758147
申请日:1977-12-27
Applicant: IBM
Inventor: CASTELLANI EUGENE EVANS , POWERS JOHN VINCENT , ROMANKIW LUBOMYR TARAS
IPC: C25D7/00 , C25D3/56 , C25D5/08 , C25D17/00 , C25D21/12 , G11B5/31 , G11B5/858 , H01F10/14 , H01F41/14 , H01F41/26 , C25D3/12 , C25D3/20
Abstract: A thin film of low magnetostriction Permalloy 80% nickel - 20% iron +/- 1% is electroplated in a bath having a ratio of about 1.8:1 to 24:1 g/liter ratio of Ni to Fe ions with a plating current density from 10 ma/cm2 - 200 ma/cm2 when plating in sheet form or an Ni/Fe ratio of 25:1 to 85:1 with a current density of 2 ma/cm2 - 110 ma/cm2 when plating through a mask. The fluid in the system is constantly mixed, replenished with fresh iron, acid, and other reagents, is adjusted in temperature and subjected to a continuous laminar regime of mixing. Fresh solution is added to the bath from a reservoir where the above adjustments are made. The inlet for the fresh solution is at the lower end of the plating chamber and directed at a bath mixer which includes a slot through which the fresh solution is directed to optimize mixing in the plating chamber. Complexing agents are avoided. High speed plating is obtained with about 24.4 g/l of Ni++, 1.05 g/l of Fe++, 25 g/l of H3BO3, 0.2 g/l of Na saccharin and a pH of 1.5 to 3.6.