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公开(公告)号：EP2089169A4
公开(公告)日：2010-12-29
申请号：EP07853978
申请日：2007-10-12
Applicant: IBM
Inventor： CRANDAL COONEY EDWARD , MURPHY WILLIAM JOSEPH , STAMPER ANTHONY KENDALL , STRIPPE DAVID CRAIG
CPC classification number: H01L21/67028 , H01J37/3244 , H01J37/32862 , H01L21/02063
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