公开(公告)号：JPS5939097A

公开(公告)日：1984-03-03

申请号：JP8782883

申请日：1983-05-20

Applicant: Ibm

Inventor： DAGURASU JIYOO HOORU ,  ROBAATO FURANSHISU RANGUREE ,  EDOUIN RUISU TOOMASU

IPC: H05K3/00 ,  H05K3/22 ,  H05K3/46

CPC classification number: H05K3/0002 ,  H05K1/0292 ,  H05K3/4644 ,  H05K2203/056

公开(公告)号：JPH04230050A

公开(公告)日：1992-08-19

申请号：JP13058791

申请日：1991-05-02

Applicant: IBM

Inventor： MAIKERU FURANKU SHINA ,  MITSUCHIERU SHIMONZU KOOEN ,  EFURAIMU BEMISU FURINTO ,  KAATO RUDORUFU GURIIBU ,  DAGURASU JIYOO HOORU ,  KENESU POORU JIYAKUSON ,  MODESUTO MAIKERU OPURISUKO

IPC: H01L21/30 ,  G02B6/42 ,  H01L21/027 ,  H01L21/68 ,  H01S5/00

Abstract: PURPOSE: To provide a highly accurate passive positioning technique suitable for positioning the several sets of objects, before providing objects on an mounting surface. CONSTITUTION: By optically positioning a reference mark 516 marked on a transparent positioning plate 500, a laser 512 and the reference marks 515 and 517 marked on a fiber carrier 511, the transparent positioning plate 500, the laser 512 and the fiber carrier 511 (one set of objects) are passively positioned. A set of the passively positioned objects are temporarily fixed by a vacuum source 504. Thus, positioning is performed accurately.