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公开(公告)号：SG72884A1
公开(公告)日：2000-05-23
申请号：SG1998004543
申请日：1998-11-05
Applicant: IBM
Inventor： DUNCOMBE PETER RICHARD , HUMMEL JOHN PATRICK , LAIBOWITZ ROBERT BENJAMIN , NEUMAYER DEBORAH ANN , SAENGER KATHERINE LYNN , SCHROTT ALEJANDRO GABRIEL
IPC: H01L21/8247 , C23C8/12 , H01L21/822 , H01L21/8242 , H01L21/8246 , H01L27/04 , H01L27/10 , H01L27/105 , H01L27/108 , H01L29/788 , H01L29/792
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