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公开(公告)号：DE3166687D1
公开(公告)日：1984-11-22
申请号：DE3166687
申请日：1981-05-15
Applicant: IBM
Inventor： BRASLAU NORMAN , FREEHOUF JOHN LAWRENCE , PETTIT GEORGE DAVID , RUPPRECHT HANS STEPHAN , WOODALL JERRY MCPHERSON
IPC: H01L29/80 , H01L21/28 , H01L21/331 , H01L29/06 , H01L29/201 , H01L29/43 , H01L29/45 , H01L29/73 , H01L29/772 , H01L29/86 , H01L29/36 , H01L29/40
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