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公开(公告)号：JPS6046619A
公开(公告)日：1985-03-13
申请号：JP9893884
申请日：1984-05-18
Applicant: IBM
Inventor： ARUMAN BURUNAN , BERUNAARU DONI , JIERAARU BUDON , PIEERU MORIE , FUIRITSUPU SUTOTSUPA
IPC: H01L21/822 , H01L21/82 , H01L27/04 , H01L27/06 , H03K19/003 , H03K19/082 , H03K19/084 , H03K19/088
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