公开(公告)号：AU2021294859A1

公开(公告)日：2022-11-17

申请号：AU2021294859

申请日：2021-06-17

Applicant: IBM

Inventor： GILL DOUGLAS ,  SANDBERG MARTIN ,  ADIGA VIVEKANANDA ,  MARTIN YVES ,  PAIK HANHEE

IPC: H01L27/18 ,  G06N10/00 ,  H01L39/04

Abstract: A method for improving lifetime and coherence time of a qubit in a quantum mechanical device includes providing a substrate having at least one qubit formed on the frontside, the at least one qubit having capacitor pads, and removing substrate material from the backside at an area opposite the qubit and/or depositing a superconducting metal layer at the backside area opposite the qubit to reduce radiofrequency electrical current loss due to at least one of silicon-air (SA) interface, metal-air (MA) interface or silicon-metal (SM) interface.