公开(公告)号：CA2107048C

公开(公告)日：1998-08-11

申请号：CA2107048

申请日：1993-09-27

Applicant: IBM

Inventor： ABRAHAM DAVID WILLIAM ,  HAMMOND JAMES MICHEAL ,  KLOS MARTIN ALLEN ,  ROESSLER KENNETH GILBERT ,  STOWELL ROBERT MARSHALL ,  WICKRAMASINGHE HEMANTHA KUMAR

IPC: G01B7/34 ,  G01B21/30 ,  G01Q70/04 ,  H01J37/20 ,  H01J37/28 ,  G02B21/26 ,  G01B7/28

Abstract: A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.