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1.发明授权
公开(公告)号：EP0594362B1
公开(公告)日：1997-12-29
申请号：EP93308209
申请日：1993-10-14
Applicant: IBM
Inventor： HAMMOND JAMES MICHAEL , KLOS MARTIN ALLEN , MARTIN YVES , ROESSLER KENNETH GILBERT , STOWELL ROBERT MARSHALL
IPC: G01B7/34 , B23Q1/34 , B23Q1/36 , B23Q1/56 , G01B5/00 , G01N37/00 , G01Q10/04 , G01Q70/04 , B23Q1/25 , G01N27/00
CPC classification number: G01Q10/04 , B23Q1/36 , G01B5/0002 , G01Q70/04
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公开(公告)号：JPH10311841A
公开(公告)日：1998-11-24
申请号：JP10891298
申请日：1998-04-20
Applicant: IBM
Inventor： FLECHA EDWIN , KLOS MARTIN ALLEN , ROESSLER KENNETH G , STOWELL ROBERT MARSHALL
Abstract: PROBLEM TO BE SOLVED: To provide a method for improving the accuracy of measurements made by a scanning probe microscope. SOLUTION: A scanning probe microscope 10 has a probe 18 which moves as it is engaged with and separated from a sample surface by the combination of deflection generated in a high-speed actuator 22 having a relatively small range of motion and deflection generated in a low-speed actuator 26 having a relatively large range of motion. If the deflection of the high speed actuator moves out of a predetermined range, the low speed actuator operates in such a way that the next operation of the high speed actuator brings the high speed actuator back to the predetermined range. If the low speed actuator is required to be operated in this way, scanning movement whereby a sample surface is moved to pass through a probe is stopped until the probe is brought to the correct engagement level with the sample surface, so that the high speed actuator is deflected within the predetermined range.
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公开(公告)号：AT153128T
公开(公告)日：1997-05-15
申请号：AT93304455
申请日：1993-06-08
Applicant: IBM
Inventor： HAMMOND JAMES MICHAEL , KLOS MARTIN ALLEN , MARTIN YVES , ROESSLER KENNETH GILBERT , STOWELL ROBERT MARSHALL
IPC: G01B21/30 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/18 , G01Q70/18 , G05D3/12 , G01B7/34 , G01N27/00
Abstract: A non-contact, step-wise method for automatically positioning a sensing probe (12), having a vibrating cantilever (18) and tip (19), above a target surface (20) utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.
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公开(公告)号：CA2107048C
公开(公告)日：1998-08-11
申请号：CA2107048
申请日：1993-09-27
Applicant: IBM
Inventor： ABRAHAM DAVID WILLIAM , HAMMOND JAMES MICHEAL , KLOS MARTIN ALLEN , ROESSLER KENNETH GILBERT , STOWELL ROBERT MARSHALL , WICKRAMASINGHE HEMANTHA KUMAR
Abstract: A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.
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公开(公告)号：DE69307833T2
公开(公告)日：1997-07-24
申请号：DE69307833
申请日：1993-11-03
Applicant: IBM
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Patent Agency Ranking
公开(公告)号：DE69315953T2
公开(公告)日：1998-06-25
申请号：DE69315953
申请日：1993-10-14
Applicant: IBM
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公开(公告)号：DE69310612T2
公开(公告)日：1997-10-30
申请号：DE69310612
申请日：1993-06-08
Applicant: IBM
Inventor： HAMMOND JAMES MICHAEL , KLOS MARTIN ALLEN , MARTIN YVES , ROESSLER KENNETH GILBERT , STOWELL ROBERT MARSHALL
IPC: G01B21/30 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/18 , G01Q70/18 , G05D3/12 , G01B7/34 , G01N27/00
Abstract: A non-contact, step-wise method for automatically positioning a sensing probe (12), having a vibrating cantilever (18) and tip (19), above a target surface (20) utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.
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公开(公告)号：DE69315953D1
公开(公告)日：1998-02-05
申请号：DE69315953
申请日：1993-10-14
Applicant: IBM
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公开(公告)号：AT161455T
公开(公告)日：1998-01-15
申请号：AT93308209
申请日：1993-10-14
Applicant: IBM
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公开(公告)号：DE69310612D1
公开(公告)日：1997-06-19
申请号：DE69310612
申请日：1993-06-08
Applicant: IBM
Inventor： HAMMOND JAMES MICHAEL , KLOS MARTIN ALLEN , MARTIN YVES , ROESSLER KENNETH GILBERT , STOWELL ROBERT MARSHALL
IPC: G01B21/30 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/18 , G01Q70/18 , G05D3/12 , G01B7/34 , G01N27/00
Abstract: A non-contact, step-wise method for automatically positioning a sensing probe (12), having a vibrating cantilever (18) and tip (19), above a target surface (20) utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.
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