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公开(公告)号：JP2002074606A
公开(公告)日：2002-03-15
申请号：JP2001194639
申请日：2001-06-27
Applicant: IBM
Abstract: PROBLEM TO BE SOLVED: To provide a writing head for a heat support type magnetic recording system attaining a narrow track width. SOLUTION: A thin film inductive writing head includes an electric resistance heater 20 disposed in a writing gap WG between the extreme tips of the writing head. A resistance heater is inserted between first and second spacer layers I1 and I2 disposed between the extreme tips of the writing head. In CIP head, spacer layers are made of insulating materials, an electric lead is formed as a part of a film between the spacer layers, and brought into contact with each side of the resistance heater. The width WR of the resistance heater is smaller than the width W of the extreme tip. Thus, writing is carried out by the extreme tip of the writing head only in the area of a magnetic layer on the disk heated by the resistance heater. Thus, the width of a data track on the disk is defined not by the shape of the extreme tip of the writing head but by the width of the resistance heater.
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公开(公告)号：DE69215326D1
公开(公告)日：1997-01-02
申请号：DE69215326
申请日：1992-09-24
Applicant: IBM
Inventor： KHOURY HENRI ANTOINE , KEI-PING CHI CALVIN , CLABES JOACHIM GERHARD , HOBBS PHILIP CHARLES DANBY , LANDSTEIN LASZLO , O'BOYLE MARTIN PATRICK , WICKRAMASINGHE HEMANTHA KUMAR , WOLTERMAN SANDRA KAY
IPC: G01B7/34 , G01B7/00 , G01B11/00 , G01B11/02 , G01B11/30 , G01B21/02 , G01B21/30 , G01M11/00 , G01N37/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/24 , G03F7/20 , G01N27/00
Abstract: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.
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公开(公告)号：DE69010634T2
公开(公告)日：1995-01-12
申请号：DE69010634
申请日：1990-08-31
Applicant: IBM
Inventor： MARTIN YVES , WICKRAMASINGHE HEMANTHA KUMAR
IPC: G01B21/30 , G01B11/30 , G01B15/00 , G01N21/00 , G01N21/31 , G01N23/00 , G01N37/00 , G01Q30/02 , G01Q60/24 , H01J37/26
Abstract: An Atomic Photo-Absorption Force Microscope 1 includes an Atomic Force Microscope 10 and a radiation source 20 having an output radiation 22 wavelength selected to be preferentially absorbed by atoms or molecules associated with a sample surface 24a under investigation. Absorption of the radiation raises at least one outer shell electron to a higher energy level, resulting in an increase in radius of the atom or molecule. A tip 12 coupled through a lever 14 to the Atomic Force Microscope 10 is scanned over the surface and operates in conjunction with a laser heterodyne interferometer 18 to directly measure the resulting atomic or molecular increase of size, thereby detecting both the presence and location of the atoms or molecules under investigation. Operation in an a.c. mode by chopping the incident radiation 22 and measuring the corresponding a.c. induced tip movement beneficially increases the sensitivity of the technique, particularly if the a.c. frequency is chosen at a resonance of the tip-lever combination.
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公开(公告)号：DE69625292D1
公开(公告)日：2003-01-23
申请号：DE69625292
申请日：1996-07-31
Applicant: IBM
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Patent Agency Ranking
公开(公告)号：DE69215326T2
公开(公告)日：1997-04-30
申请号：DE69215326
申请日：1992-09-24
Applicant: IBM
Inventor： KHOURY HENRI ANTOINE , KEI-PING CHI CALVIN , CLABES JOACHIM GERHARD , HOBBS PHILIP CHARLES DANBY , LANDSTEIN LASZLO , O'BOYLE MARTIN PATRICK , WICKRAMASINGHE HEMANTHA KUMAR , WOLTERMAN SANDRA KAY
IPC: G01B7/34 , G01B7/00 , G01B11/00 , G01B11/02 , G01B11/30 , G01B21/02 , G01B21/30 , G01M11/00 , G01N37/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/24 , G03F7/20 , G01N27/00
Abstract: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.
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