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公开(公告)号：DE2313725A1
公开(公告)日：1973-10-11
申请号：DE2313725
申请日：1973-03-20
Applicant: IBM
Inventor： BATTISTA MARIO ALPHONSE , FREED LARRY ERNEST , HARBISON RICHARD STEPHEN , NESTORK WILLIAM JOHN , STRUK JAMES ROBERT , TUMAN DANIEL
IPC: H01L21/822 , H01L21/761 , H01L21/82 , H01L23/485 , H01L27/00 , H01L27/02 , H01L27/04 , H01L27/118 , H01L19/00
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