公开(公告)号：JPH11258251A

公开(公告)日：1999-09-24

申请号：JP36210998

申请日：1998-12-21

Applicant: IBM

Inventor： BAYER THOMAS ,  GRESCHNER JOHANN DR ,  DR ROBERT YUNJINJAA ,  KALT SAMUEL ,  HELGA WEISS

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/24 ,  G01Q60/38

Abstract: PROBLEM TO BE SOLVED: To provide a micromachine-type sensor which is used to measure a shape by an atomic force microscope (AFM)/a scanning tunneling microscope(STM). SOLUTION: A micromachine-type sensor which is used to measure a shape by an AFM/an STM contains a cantilever beam 2 which holds a tip part 1a at one end and a fixed block 2 at the other end which is separated at a proper distance from the tip part 1a. The cantilever beam 2, the tip part 1a and the fixed block 3 are formed to be of a micromachine type. The tip part 1a is formed on the cantilever beam 2 at an angle of, e.g., 92 to 105 deg.. As a proper execution example, the tip part 1a is composed of polycrystal diamond, the cantilever beam 2 is composed of silicon nitride, and the fixed block 3 is composed of Pyrex glass. In addition, this invention is related to a tip part which is formed on a pedestal, to a tip part which comprises an arrow-shaped or spherical tip and to a method which forms the micromachine-type sensor.