公开(公告)号：DE69215326D1

公开(公告)日：1997-01-02

申请号：DE69215326

申请日：1992-09-24

Applicant: IBM

Inventor： KHOURY HENRI ANTOINE ,  KEI-PING CHI CALVIN ,  CLABES JOACHIM GERHARD ,  HOBBS PHILIP CHARLES DANBY ,  LANDSTEIN LASZLO ,  O'BOYLE MARTIN PATRICK ,  WICKRAMASINGHE HEMANTHA KUMAR ,  WOLTERMAN SANDRA KAY

IPC: G01B7/34 ,  G01B7/00 ,  G01B11/00 ,  G01B11/02 ,  G01B11/30 ,  G01B21/02 ,  G01B21/30 ,  G01M11/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/24 ,  G03F7/20 ,  G01N27/00

Abstract: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.

公开(公告)号：DE69215326T2

公开(公告)日：1997-04-30

申请号：DE69215326

申请日：1992-09-24

Applicant: IBM

Inventor： KHOURY HENRI ANTOINE ,  KEI-PING CHI CALVIN ,  CLABES JOACHIM GERHARD ,  HOBBS PHILIP CHARLES DANBY ,  LANDSTEIN LASZLO ,  O'BOYLE MARTIN PATRICK ,  WICKRAMASINGHE HEMANTHA KUMAR ,  WOLTERMAN SANDRA KAY

IPC: G01B7/34 ,  G01B7/00 ,  G01B11/00 ,  G01B11/02 ,  G01B11/30 ,  G01B21/02 ,  G01B21/30 ,  G01M11/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/24 ,  G03F7/20 ,  G01N27/00

Abstract: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.