Method of forming a microwave array transistor for low-noise and high-power applications
    1.
    发明授权
    Method of forming a microwave array transistor for low-noise and high-power applications 失效
    形成用于低噪声和大功率应用的微波阵列晶体管的方法

    公开(公告)号:US6423603B2

    公开(公告)日:2002-07-23

    申请号:US92165601

    申请日:2001-08-06

    Applicant: IBM

    CPC classification number: H01L29/73 H01L27/0823 H01L29/0692

    Abstract: A transistor array including a plurality of transistors. Each transistor includes an emitter. An emitter region contact overlies each emitter region. At least one base region underlies each emitter region and is common to a plurality of transistors in the array. At least one base contact overlies the at least one base region and is associated with each transistor. A plurality of the base contacts are common to at least two transistors in the array. At least one collector reach through is associated with each transistor. A collector reach through contact overlies each collector reach through. A buried layer subcollector region of electrically conducting material electrically connects the collector reach through region to the collector pedestal region of each transistor.

    Abstract translation: 一种包括多个晶体管的晶体管阵列。 每个晶体管包括发射极。 发射极区域接触覆盖每个发射极区域。 至少一个基极区域位于每个发射极区域的下面,并且对阵列中的多个晶体管是共同的。 至少一个基极接触覆盖至少一个基极区域并与每个晶体管相关联。 多个基极触点对于阵列中的至少两个晶体管是共同的。 至少一个集电极通过与每个晶体管相关联。 通过接触覆盖的收集器覆盖每个收集器到达。 导电材料的埋层子集电极区域将集电极到达区域电连接到每个晶体管的集电极基座区域。

    3.
    发明专利
    未知

    公开(公告)号:DE60128883D1

    公开(公告)日:2007-07-26

    申请号:DE60128883

    申请日:2001-12-10

    Applicant: IBM

    Abstract: The invention provides a PIN diode having a laterally extended I-region (5). The invention also provides a method of fabricating the inventive PIN diode compatible with modern RF technologies such as silicon-germanium BiCMOS processes.

    4.
    发明专利
    未知

    公开(公告)号:AT364901T

    公开(公告)日:2007-07-15

    申请号:AT01310302

    申请日:2001-12-10

    Applicant: IBM

    Abstract: The invention provides a PIN diode having a laterally extended I-region (5). The invention also provides a method of fabricating the inventive PIN diode compatible with modern RF technologies such as silicon-germanium BiCMOS processes.

    5.
    发明专利
    未知

    公开(公告)号:DE60128883T2

    公开(公告)日:2008-02-14

    申请号:DE60128883

    申请日:2001-12-10

    Applicant: IBM

    Abstract: The invention provides a PIN diode having a laterally extended I-region (5). The invention also provides a method of fabricating the inventive PIN diode compatible with modern RF technologies such as silicon-germanium BiCMOS processes.

    IGFET with improved props - using two stage doping in source and drain regions

    公开(公告)号:FR2293795A1

    公开(公告)日:1976-07-02

    申请号:FR7533870

    申请日:1975-10-29

    Applicant: IBM

    Abstract: Field effect transistors are made by (a) prepg. a semiconductor substrate of first conductivity type (b) forming a masking layer with a drain window (c) introducing an opposite type impurity into the exposed region through the window, (d) diffusing the impurity into the substrate and (e) introducing an additional impurity of second type conductivity into the opening to form a concentration of second type impyrities, important to the neighbourhood of the opening so that the drain region has a gradual changing impurity profile. Design of the device permits use of or max. working voltage for a given channel length.

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